- All sections
- C - Chemistry; metallurgy
- C23C - Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 14/35 - Sputtering by application of a magnetic field, e.g. magnetron sputtering
Patent holdings for IPC class C23C 14/35
Total number of patents in this class: 2449
10-year publication summary
181
|
208
|
203
|
210
|
217
|
233
|
227
|
216
|
164
|
3
|
2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
Owner |
All patents
|
This class
|
---|---|---|
Applied Materials, Inc. | 17676 |
270 |
ULVAC, Inc. | 1405 |
89 |
Oerlikon Surface Solutions AG, Pfaffikon | 557 |
72 |
Canon Anelva Corporation | 681 |
54 |
Taiwan Semiconductor Manufacturing Company, Ltd. | 40493 |
52 |
Tokyo Electron Limited | 12067 |
51 |
Beijing Naura Microelectronics Equipment Co., Ltd. | 496 |
46 |
Evatec AG | 150 |
34 |
Cardinal CG Company | 222 |
31 |
Dyson Technology Limited | 3410 |
27 |
Walter AG | 252 |
26 |
Saint-Gobain Glass France | 3774 |
25 |
Boe Technology Group Co., Ltd. | 38724 |
20 |
Nitto Denko Corporation | 8069 |
19 |
Intevac, Inc. | 133 |
19 |
Samsung Display Co., Ltd. | 32641 |
18 |
Centre National de La Recherche Scientifique | 10052 |
15 |
IonQuest Corp., FORMERLY IonQuest LLC | 16 |
15 |
Vapor Technologies, Inc. | 63 |
14 |
SPTS Technologies Limited | 130 |
14 |
Other owners | 1538 |