- All sections
- C - Chemistrymetallurgy
- C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 14/35 - Sputtering by application of a magnetic field, e.g. magnetron sputtering
Patent holdings for IPC class C23C 14/35
Total number of patents in this class: 2666
10-year publication summary
|
208
|
203
|
210
|
217
|
234
|
229
|
220
|
167
|
168
|
89
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 20467 |
277 |
| ULVAC, Inc. | 1344 |
87 |
| Oerlikon Surface Solutions AG, Pfaffikon | 558 |
72 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 48560 |
68 |
| Tokyo Electron Limited | 13871 |
55 |
| Canon Anelva Corporation | 684 |
55 |
| Beijing Naura Microelectronics Equipment Co., Ltd. | 746 |
49 |
| Evatec AG | 155 |
36 |
| Dyson Technology Limited | 4016 |
28 |
| Saint-Gobain Glass France | 3238 |
27 |
| Walter AG | 268 |
27 |
| Cardinal CG Company | 214 |
25 |
| Samsung Display Co., Ltd. | 38817 |
23 |
| Intevac, Inc. | 128 |
21 |
| Nitto Denko Corporation | 8558 |
20 |
| Boe Technology Group Co., Ltd. | 44409 |
20 |
| Centre National de La Recherche Scientifique | 11059 |
17 |
| Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | 6111 |
17 |
| SPTS Technologies Limited | 148 |
16 |
| IonQuest Corp., FORMERLY IonQuest LLC | 15 |
15 |
| Other owners | 1711 |