Patent holdings for IPC class G21G 5/00

Total number of patents in this class: 142

10-year publication summary

5
5
3
0
3
0
0
0
1
0
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
5241
18
ASML Netherlands B.V.
7312
9
Varian Semiconductor Equipment Associates, Inc.
1233
7
FEI Company
937
7
NuFlare Technology, Inc.
836
5
Techinsights Inc.
95
4
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
158
3
ION Beam Applications S.A.
187
3
The Regents of the University of California
19812
2
Texas Instruments Incorporated
19487
2
Mitsubishi Electric Corporation
45811
2
Tokyo Electron Limited
12540
2
United Microelectronics Corp.
4224
2
Commissariat à l'énergie atomique et aux energies alternatives
10837
2
Lawrence Livermore National Security, LLC
1925
2
Carl Zeiss SMT GmbH
2940
2
Accuray Incorporated
385
2
Advanced ION Beam Technology, Inc.
71
2
Axcelis Technologies, Inc.
400
2
IMS Nanofabrication GmbH
59
2
Other owners 62