- All sections
- G - Physics
- G21K - Techniques for handling particles or ionising radiation not otherwise provided for; irradiation devices; gamma ray or x-ray microscopes
- G21K 5/10 - Irradiation devices with provision for relative movement of beam source and object to be irradiated
Patent holdings for IPC class G21K 5/10
Total number of patents in this class: 422
10-year publication summary
|
20
|
24
|
23
|
14
|
9
|
11
|
15
|
3
|
11
|
0
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Varian Semiconductor Equipment Associates, Inc. | 1252 |
24 |
| Axcelis Technologies, Inc. | 397 |
17 |
| NuFlare Technology, Inc. | 805 |
17 |
| ASML Netherlands B.V. | 7130 |
15 |
| Hitachi High-Tech Corporation | 5028 |
9 |
| Hitachi Zosen Corporation | 620 |
8 |
| FEI Company | 892 |
7 |
| ION Beam Applications S.A. | 189 |
7 |
| Accuray Incorporated | 391 |
6 |
| Gatan, Inc. | 109 |
6 |
| Canon Inc. | 38071 |
5 |
| Applied Materials, Inc. | 17696 |
5 |
| Best Theratronics Ltd. | 55 |
5 |
| NexGen Semi Holding, Inc. | 22 |
5 |
| Xyleco, Inc. | 191 |
5 |
| The Regents of the University of California | 19493 |
4 |
| Hitachi High-Tech Science Corporation | 323 |
4 |
| Tsinghua University | 5690 |
4 |
| Hamamatsu Photonics K.K. | 4305 |
4 |
| Advanced ION Beam Technology, Inc. | 71 |
4 |
| Other owners | 261 |