Patent holdings for IPC class H01J 37/073

Total number of patents in this class: 353

10-year publication summary

20
15
28
36
31
29
39
38
25
11
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
5374
47
Photo Electron Soul Inc.
32
28
Hitachi High-Technologies Corporation
2001
20
KLA-Tencor Corporation
2544
19
KLA Corporation
1605
17
ASML Netherlands B.V.
7441
15
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
157
11
National Institute for Materials Science
1105
9
NuFlare Technology, Inc.
858
8
National Institute of Advanced Industrial Science and Technology
3793
7
Denki Kagaku Kogyo Kabushiki Kaisha
625
7
Nikon Corporation
7265
6
Centre National de La Recherche Scientifique
10531
5
Applied Materials, Inc.
18892
5
38th Research Institute, China Electronics Technology Group Corporation
50
5
FEI Company
952
5
Commissariat à l'énergie atomique et aux energies alternatives
10946
4
Hamamatsu Photonics K.K.
4448
4
Board of Trustees of Michigan State University
1192
4
JEOL Ltd.
594
4
Other owners 123