Patent holdings for IPC class H01J 37/073

Total number of patents in this class: 376

10-year publication summary

15
28
36
31
31
39
38
25
22
14
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
5819
52
Photo Electron Soul Inc.
35
29
Hitachi High-Technologies Corporation
1987
20
KLA-Tencor Corporation
2518
19
KLA Corporation
1844
18
ASML Netherlands B.V.
7906
16
Denka Company Limited
2712
11
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
157
11
National Institute for Materials Science
1087
9
National Institute of Advanced Industrial Science and Technology
3790
8
NuFlare Technology, Inc.
918
8
Nikon Corporation
7235
6
Denki Kagaku Kogyo Kabushiki Kaisha
581
6
FEI Company
1052
6
Centre National de La Recherche Scientifique
11016
5
Applied Materials, Inc.
20363
5
38th Research Institute, China Electronics Technology Group Corporation
55
5
Commissariat à l'énergie atomique et aux energies alternatives
11127
4
Hamamatsu Photonics K.K.
4669
4
Board of Trustees of Michigan State University
1208
4
Other owners 130