Patent holdings for IPC class H01J 37/14

Total number of patents in this class: 152

10-year publication summary

12
17
15
16
16
14
18
18
7
5
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
ASML Netherlands B.V.
7312
25
Hitachi High-Tech Corporation
5241
19
FEI Company
937
11
KLA Corporation
1512
11
Hermes Microvision Incorporated B.V.
124
7
Carl Zeiss MultiSEM GmbH
125
7
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
158
6
JEOL Ltd.
572
6
Varian Semiconductor Equipment Associates, Inc.
1233
5
KLA-Tencor Corporation
2546
5
Carl Zeiss Microscopy GmbH
1200
4
NuFlare Technology, Inc.
836
3
Intel Corporation
46699
2
Hitachi High-Technologies Corporation
2004
2
Shimadzu Corporation
6132
2
Advantest Corporation
1831
2
Northwestern University
3364
2
Mevion Medical Systems, Inc.
106
2
Technische Universiteit Delft
719
2
Toshiba Corporation
12286
1
Other owners 28