Patent holdings for IPC class H01J 37/143

Total number of patents in this class: 34

10-year publication summary

2
3
1
3
3
1
4
3
3
0
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
ASML Netherlands B.V.
7434
7
Hermes Microvision Incorporated B.V.
124
4
Hitachi High-Technologies Corporation
2002
3
KLA Corporation
1603
3
Nikon Corporation
7213
2
IMS Nanofabrication GmbH
59
2
Param Corporation
8
2
Hitachi High-Tech Corporation
5364
2
Thermo Electron Scientific Instruments LLC
191
1
Advantest Corporation
1786
1
Board of Trustees of Michigan State University
1191
1
FEI Company
950
1
Huazhong University of Science and Technology
1065
1
KLA-Tencor Corporation
2544
1
Nfab Limited
3
1
Topcon Corporation
1092
1
Carl Zeiss MultiSEM GmbH
139
1
Other owners 0