Patent holdings for IPC class H01J 37/143

Total number of patents in this class: 34

10-year publication summary

3
1
3
3
1
4
3
3
1
0
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
ASML Netherlands B.V.
7762
7
Hermes Microvision Incorporated B.V.
123
4
KLA Corporation
1790
4
Hitachi High-Technologies Corporation
1992
3
Nikon Corporation
7298
2
IMS Nanofabrication GmbH
59
2
Param Corporation
8
2
Hitachi High-Tech Corporation
5669
2
Thermo Electron Scientific Instruments LLC
186
1
Advantest Corporation
1704
1
Board of Trustees of Michigan State University
1209
1
FEI Company
1045
1
Huazhong University of Science and Technology
1106
1
KLA-Tencor Corporation
2523
1
Nfab Limited
3
1
Carl Zeiss MultiSEM GmbH
173
1
Other owners 0