- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/153 - Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
Patent holdings for IPC class H01J 37/153
Total number of patents in this class: 501
10-year publication summary
|
18
|
24
|
29
|
39
|
32
|
52
|
51
|
46
|
58
|
34
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Hitachi High-Tech Corporation | 5364 |
81 |
| ASML Netherlands B.V. | 7434 |
72 |
| Hitachi High-Technologies Corporation | 2002 |
52 |
| FEI Company | 950 |
33 |
| JEOL Ltd. | 591 |
32 |
| NuFlare Technology, Inc. | 852 |
31 |
| ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | 156 |
30 |
| Carl Zeiss MultiSEM GmbH | 139 |
23 |
| Carl Zeiss Microscopy GmbH | 1217 |
11 |
| KLA Corporation | 1603 |
11 |
| KLA-Tencor Corporation | 2544 |
10 |
| Applied Materials Israel, Ltd. | 611 |
6 |
| Technische Universiteit Delft | 729 |
6 |
| Varian Semiconductor Equipment Associates, Inc. | 1231 |
5 |
| CEOS Corrected Electron Optical Systems GmbH | 12 |
5 |
| Kioxia Corporation | 10387 |
5 |
| International Business Machines Corporation | 61433 |
4 |
| Intelligent Virus Imaging Inc. | 39 |
4 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 43258 |
3 |
| Axcelis Technologies, Inc. | 419 |
3 |
| Other owners | 74 |