Patent holdings for IPC class H01J 37/153

Total number of patents in this class: 506

10-year publication summary

18
24
29
39
32
52
51
46
58
41
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
5482
81
ASML Netherlands B.V.
7593
72
Hitachi High-Technologies Corporation
1996
52
FEI Company
995
34
JEOL Ltd.
600
32
NuFlare Technology, Inc.
886
32
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
155
31
Carl Zeiss MultiSEM GmbH
151
24
KLA Corporation
1668
14
Carl Zeiss Microscopy GmbH
1229
11
KLA-Tencor Corporation
2537
10
Applied Materials Israel, Ltd.
619
6
Technische Universiteit Delft
745
6
Varian Semiconductor Equipment Associates, Inc.
1224
5
Kioxia Corporation
10455
5
International Business Machines Corporation
61747
4
Intelligent Virus Imaging Inc.
37
4
Taiwan Semiconductor Manufacturing Company, Ltd.
46182
3
Axcelis Technologies, Inc.
424
3
CEOS Corrected Electron Optical Systems GmbH
10
3
Other owners 74