• All sections
• H - Electricity
• H01L - Semiconductor devices not covered by class
• H01L 21/383 - Diffusion of impurity materials, e.g. doping materials, electrode materials, into, or out of, a semiconductor body, or between semiconductor regions using diffusion into, or out of, a solid from or into a gaseous phase

Patent holdings for IPC class H01L 21/383

Total number of patents in this class: 63

10-year publication summary

Principal owners for this class