• All sections
• H - Electricity
• H01L - Semiconductor devices not covered by class
• H01L 21/475 - Treatment of semiconductor bodies using processes or apparatus not provided for in groups to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting to form insulating layers thereon, e.g. for masking or by using photolithographic techniquesAfter-treatment of these layers using masks

Patent holdings for IPC class H01L 21/475

Total number of patents in this class: 69

10-year publication summary

Principal owners for this class