|
2026
|
P/S
|
Computer software for computational lithography, including software for lithography simulation, s... |
|
|
P/S
|
Machines for lithography; machines for patterning substrates; machines for use in the fields of e... |
|
|
P/S
|
Fittings and accessories for lithographic machines, included in this class. Electronic and optica... |
|
|
Invention
|
Lithographic apparatus, multi-wavelength phase-modulated scanning metrology system and method.
A... |
|
|
Invention
|
Method for reducing the effects of parasitic forces and/or moments on the imaging quality of a pr... |
|
|
Invention
|
Method for determining a sampling scheme, a semiconductor substrate measurement apparatus, a lith... |
|
|
Invention
|
Dark field digital holographic microscope and associated metrology method.
A dark field digital ... |
|
|
Invention
|
Charged particle system, aperture array, charged particle tool and method of operating a charged ... |
|
|
P/S
|
Optical alignment sensors and measuring instruments for determining semiconductor wafer position,... |
|
|
P/S
|
Optical alignment sensors and measuring instruments for
determining semiconductor wafer position... |
|
2025
|
Invention
|
Metrology system and lithographic apparatus. A sensor head arrangement comprising: a first sensor... |
|
|
Invention
|
Low noise and high stability current source. A charged-particle inspection apparatus includes a c... |
|
|
Invention
|
High-voltage cable connector with embedded current transformer. Systems and methods for monitorin... |
|
|
Invention
|
A metrology system. A metrology system comprises: a substrate support; a sensor support; a plural... |
|
|
Invention
|
Alignment measurement system. A substrate alignment measurement system comprising: an illuminatio... |
|
|
Invention
|
Metrology tool and components therefor. An optical coupler for a photonic integrated circuit comp... |
|
|
Invention
|
Object table comprising an electrostatic clamp.
Disclosed is an object table for holding an obje... |
|
|
Invention
|
Droplet generator. A droplet generator assembly comprising a droplet generator, a modulation cont... |
|
|
Invention
|
Computational lithography simulation using a multi-channel physics-informed neural network for a ... |
|
|
Invention
|
Defect identification and segmentation without labeled data and image quality enhancement. An app... |
|
|
Invention
|
Measurement charge removal and per-layer stack geometry inference using diffusion models. A metho... |
|
|
Invention
|
Object holder. There is provided an object holder configured to support an object used in an expo... |
|
|
Invention
|
Computational lithography simulation using linear-fading-aware source-mask optimization. A non-tr... |
|
|
Invention
|
Systems and methods for target material waste management in euv light sources. Systems and method... |
|
|
Invention
|
Automatically initialize pupil-wavefront pair for effective pupil-wavefront-mask co-optimization.... |
|
|
Invention
|
Using generative artifical intelligence for charged-particle beam image defect detection. A non-t... |
|
|
Invention
|
Mask 3d modeling method for varied illumination incident angles in photolithography. A method for... |
|
|
Invention
|
System and method for compensating plasma pressure on tin droplets using a nonlinear model. An il... |
|
|
Invention
|
Control of conversion efficiency in an euv source. Disclosed is an apparatus for and method of co... |
|
|
Invention
|
Transmission image sensor for exposure apparatus. A transmission image sensor (IS1, IS2) comprise... |
|
|
Invention
|
Contamination control in an euv light source. A method is performed for controlling contamination... |
|
|
Invention
|
System and method for detecting a break in a pellicle. The present invention provides a system fo... |
|
|
Invention
|
Systems and methods for an apparatus for joining substrates. The present disclosure relates to a ... |
|
|
Invention
|
Bonding systems and methods. An apparatus for transferring dies for bonding to a substrate, the a... |
|
|
Invention
|
Using generative artifical intelligence for focus and dose metrology and for generating reference... |
|
|
Invention
|
Method and apparatus for correcting processes related to bonded substrates. A method that compris... |
|
|
Invention
|
Method of detecting ghost particles from patterning device inspection data. A method of processin... |
|
|
Invention
|
Apparatus for joining substrates and methods. The present invention provides an apparatus for bon... |
|
|
Invention
|
Discharge damage mitigation unit. The present invention provides a discharge damage mitigation un... |
|
|
Invention
|
Reticle storage system. A reticle storage system comprises: at least one store configured to stor... |
|
|
Invention
|
Potential corrector unit, apparatus, and method of using the potential corrector unit. The presen... |
|
|
Invention
|
Detector module. A detector module configured to detect charged particles emitted by a sample, th... |
|
|
Invention
|
Die supplier. A die supplier comprising: a donor support configured to support and rotate a donor... |
|
|
Invention
|
Apparatus and method for reducing contaminant accumulation in a radiation source. An apparatus fo... |
|
|
P/S
|
Semiconductor manufacturing machines and semiconductor
machinery. Electronic imaging hardware an... |
|
|
P/S
|
Testing apparatus using electron beam for inspection of semiconductor materials, devices and prod... |
|
|
P/S
|
Electronic testing apparatus, data processors, computer
hardware and software for defect inspect... |
|
|
P/S
|
Testing apparatus using electron beam for inspection of
semiconductor materials, devices and pro... |
|
|
P/S
|
Electric and electronic process control apparatus for the production of semiconductor components,... |
|
|
P/S
|
Computer software for use in processing semiconductor wafers; computer software, recorded; semi-c... |
|
|
P/S
|
Computer software for use in processing semiconductor
wafers; computer software, recorded; semi-... |
|
|
P/S
|
Downloadable computer software for use in processing semiconductor wafers; Recorded computer soft... |
|
2024
|
P/S
|
Semiconductor manufacturing machines and semiconductor machinery.. Electronic imaging hardware an... |
|
|
P/S
|
Semi-conductor lithographic machines, and their parts and fittings. |
|
|
P/S
|
Semi-conductor lithographic machines, and their parts and
fittings. |
|
|
P/S
|
Semiconductor manufacturing machines and semiconductor machinery. Electronic imaging hardware in ... |
|
|
P/S
|
Electron beam tool for inspecting semiconductor materials, devices and processes |
|
|
P/S
|
Inspection tool using an electron beam for inspection of
semiconductor materials, devices and pr... |
|
|
P/S
|
Inspection tool using an electron beam for inspection of semiconductor materials, devices and pro... |
|
2023
|
Invention
|
In-situ cleaning for lithographic apparatus.
A photoelectric plate (300) for use in place of a p... |
|
|
Invention
|
Determining a focus position for imaging a substrate with an integrated photonic sensor.
A metro... |
|
|
Invention
|
Phase generated carrier interrogator and associated phase generated carrier interrogation method.... |
|
|
Invention
|
Determining a focus position based on a field image position shift.
The metrology system(s) and ... |
|
|
Invention
|
Vacuum table and method for clamping warped substrates.
The disclosure provides a vacuum table, ... |
|
|
Invention
|
Method for labeling time series data relating to one or more machines.
Disclosed is a method for... |
|
|
Invention
|
Improved reticle and reticle blank.
There is provided a reticle or a reticle blank comprising a ... |
|
|
Invention
|
Pellicle membrane and method of manufacture.
A pellicle membrane includes thermally emissive cry... |
|
|
Invention
|
Photonic integrated circuit for generating broadband radiation.
A photonic integrated circuit in... |
|
|
Invention
|
Correcting scan data.
A method for correcting scan data generated by scanning a sample with char... |
|
|
Invention
|
Substrate holder, lithographic apparatus, computer program and method.
A substrate holding syste... |
|
|
P/S
|
Machines for micro lithography and machines for use in the manufacture, fabrication and treatment... |
|
|
P/S
|
Machines for micro lithography and machines for use in the
fields of integrated circuits, semico... |
|
|
P/S
|
Registered software, namely, recorded software for the storage, processing and generation of data... |
|
|
P/S
|
Software, especially software for the storage, processing
and generation of data and graphics. |
|
2022
|
P/S
|
Software, especially software for the storage, processing and generation of data and graphics. |
|
|
P/S
|
Micro-lithography apparatus and instruments for use in the electronics, micro-lithography, semi-c... |
|
2021
|
P/S
|
Recorded software, in particular software for the storage, processing, and generation of data and... |
|
2020
|
P/S
|
Maintenance and repair services in connection with machines for use in microlithography and in th... |
|
|
P/S
|
Maintenance and repair services in connection with machines for use in the electronics, micro-lit... |
|
|
P/S
|
Maintenance and repair services in connection with machines
for use in the electronics, micro-li... |
|
2018
|
P/S
|
Computer hardware and software for the design and manufacture of semiconductor wafers and masks; ... |
|
|
P/S
|
Computer hardware and software for the design and
manufacture of semiconductor wafers and masks;... |
|
2017
|
P/S
|
Semiconductor lithographic machines, namely, lithographic machines used to manufacture semiconduc... |
|
|
P/S
|
Computer hardware for improving lithography manufacturing
processes; computer software for impro... |
|
|
P/S
|
Micro-lithography machines, namely, machines for manufacturing electronic components, integrated ... |
|
2016
|
P/S
|
Micro-lithography equipment; machines for use in the manufacture by micro-lithography, especially... |
|
2015
|
P/S
|
Exposure units being optical instruments and their parts, for use in lithographic machines, namel... |
|
|
P/S
|
Exposure units [optical instruments] and their parts, for
use in lithographic machines. |
|
|
P/S
|
Electronic inspection devices, data processors, computer hardware and software for defect inspect... |
|
|
P/S
|
[ Electronic inspection devices and ] computer software for inspection of semiconductor materials... |
