- All sections
- C - Chemistrymetallurgy
- C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 14/46 - Sputtering by ion beam produced by an external ion source
Patent holdings for IPC class C23C 14/46
Total number of patents in this class: 168
10-year publication summary
|
13
|
12
|
8
|
8
|
14
|
10
|
16
|
9
|
8
|
1
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 19717 |
17 |
| Fujikura Ltd. | 3025 |
6 |
| Hoya Corporation | 2757 |
5 |
| Plasma-therm NES LLC | 17 |
5 |
| Veeco Instruments Inc. | 333 |
5 |
| The Boeing Company | 20111 |
4 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 46661 |
4 |
| Canon Anelva Corporation | 688 |
4 |
| Tel Manufacturing and Engineering of America, Inc. | 139 |
4 |
| Varian Semiconductor Equipment Associates, Inc. | 1211 |
3 |
| Commissariat à l'énergie atomique et aux energies alternatives | 10971 |
3 |
| New Zealand Institute for Earth Science Limited | 10 |
3 |
| Samsung Display Co., Ltd. | 37314 |
2 |
| The Regents of the University of California | 20410 |
2 |
| Weatherford Technology Holdings, LLC | 2034 |
2 |
| Lawrence Livermore National Security, LLC | 1955 |
2 |
| Carl Zeiss SMT GmbH | 3169 |
2 |
| Advanced Micro-fabrication Equipment, Inc. China | 110 |
2 |
| Board of Trustees of Michigan State University | 1210 |
2 |
| Dorco Co., Ltd. | 409 |
2 |
| Other owners | 89 |