- All sections
- C - Chemistrymetallurgy
- C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/18 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
Patent holdings for IPC class C23C 16/18
Total number of patents in this class: 1135
10-year publication summary
|
79
|
85
|
57
|
77
|
69
|
116
|
96
|
73
|
77
|
22
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 20085 |
109 |
| Adeka Corporation | 1365 |
76 |
| L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude | 4056 |
74 |
| ASM IP Holding B.V. | 2299 |
65 |
| Tokyo Electron Limited | 13561 |
49 |
| Tanaka Kikinzoku Kogyo K.K. | 574 |
44 |
| Entegris, Inc. | 1985 |
36 |
| Up Chemical Co., Ltd. | 69 |
27 |
| Merck Patent GmbH | 5668 |
25 |
| Versum Materials US, LLC | 669 |
24 |
| American Air Liquide, Inc. | 263 |
23 |
| Umicore AG & Co. KG | 855 |
21 |
| BASF SE | 21150 |
20 |
| Hansol Chemical Co., Ltd. | 172 |
20 |
| Tosoh Corporation | 1388 |
17 |
| Wayne State University | 693 |
17 |
| Samsung Electronics Co., Ltd. | 154406 |
14 |
| Lam Research Corporation | 5544 |
14 |
| Commissariat à l'énergie atomique et aux energies alternatives | 11020 |
14 |
| Korea Research Institute of Chemical Technology | 1445 |
14 |
| Other owners | 432 |