- All sections
- G - Physics
- G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devicesmaterials therefororiginals thereforapparatus specially adapted therefor
- G03F 1/66 - Containers specially adapted for masks, mask blanks or pelliclesPreparation thereof
Patent holdings for IPC class G03F 1/66
Total number of patents in this class: 266
10-year publication summary
|
11
|
10
|
16
|
14
|
22
|
34
|
28
|
43
|
30
|
40
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Entegris, Inc. | 1908 |
62 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 46161 |
46 |
| Gudeng Precision Industrial Co., Ltd. | 159 |
30 |
| ASML Netherlands B.V. | 7585 |
18 |
| Brooks Automation (Germany) GmbH | 95 |
10 |
| Samsung Electronics Co., Ltd. | 149087 |
6 |
| Shin-Etsu Chemical Co., Ltd. | 5784 |
6 |
| Mitsui Chemicals, Inc. | 3230 |
6 |
| Applied Materials, Inc. | 19248 |
5 |
| Nikon Corporation | 7303 |
5 |
| Murata Machinery, Ltd. | 1527 |
5 |
| ASML Holding N.V. | 498 |
4 |
| Gudeng Equipment Co., Ltd. | 23 |
4 |
| Boe Technology Group Co., Ltd. | 41781 |
3 |
| Fine Semitech Corp. | 28 |
3 |
| IUCF-HYU (Industry-University Cooperation Foundation Hanyang University) | 1459 |
3 |
| Ordos Yuansheng Optoelectronics Co., Ltd. | 1279 |
3 |
| Changxin Memory Technologies, Inc. | 4928 |
3 |
| FUJIFILM Corporation | 29817 |
2 |
| Tokyo Electron Limited | 13136 |
2 |
| Other owners | 40 |