Patent holdings for IPC class H01J 37/04

Total number of patents in this class: 617

10-year publication summary

46
41
55
40
49
37
45
45
42
8
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
NuFlare Technology, Inc.
898
117
ASML Netherlands B.V.
7673
69
FEI Company
1021
37
Hitachi High-Tech Corporation
5578
35
Hitachi High-Technologies Corporation
1993
27
Applied Materials, Inc.
19717
21
Mapper Lithography IP B.V.
132
19
KLA Corporation
1754
13
Carl Zeiss MultiSEM GmbH
160
13
Intel Corporation
46583
10
IMS Nanofabrication GmbH
60
9
Hitachi, Ltd.
15819
8
Axcelis Technologies, Inc.
430
8
Carl Zeiss Microscopy GmbH
1242
8
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
155
8
JEOL Ltd.
614
8
Lam Research Corporation
5452
7
KLA-Tencor Corporation
2525
7
Varian Semiconductor Equipment Associates, Inc.
1211
6
Tokyo Electron Limited
13410
6
Other owners 181