Patent holdings for IPC class H01J 37/063

Total number of patents in this class: 94

10-year publication summary

8
7
2
11
13
6
7
8
8
5
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
NuFlare Technology, Inc.
886
9
ASML Netherlands B.V.
7593
5
Canon Anelva Corporation
690
5
KLA Corporation
1668
5
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
155
4
KLA-Tencor Corporation
2537
4
Sumitomo Heavy Industries ION Technology Co., Ltd.
119
4
Hitachi High-Tech Corporation
5482
4
Denki Kagaku Kogyo Kabushiki Kaisha
617
3
Arcam AB
202
2
Axcelis Technologies, Inc.
424
2
IMS Nanofabrication GmbH
60
2
JEOL Ltd.
600
2
Mapper Lithography IP B.V.
132
2
National Institute for Materials Science
1092
2
NuFlare Technology America, Inc.
23
2
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
6125
2
Samsung Electronics Co., Ltd.
149198
1
Hitachi High-Technologies Corporation
1996
1
Applied Materials, Inc.
19298
1
Other owners 32