Patent holdings for IPC class H01J 37/10

Total number of patents in this class: 319

10-year publication summary

22
24
29
38
36
35
32
18
27
12
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
5241
41
ASML Netherlands B.V.
7312
38
Carl Zeiss Microscopy GmbH
1200
25
NuFlare Technology, Inc.
836
21
JEOL Ltd.
572
20
FEI Company
937
19
Carl Zeiss MultiSEM GmbH
125
18
KLA Corporation
1512
14
KLA-Tencor Corporation
2546
12
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
158
11
Applied Materials Israel, Ltd.
601
7
Hitachi High-Technologies Corporation
2004
6
Hitachi High-Tech Science Corporation
324
6
Varian Semiconductor Equipment Associates, Inc.
1233
6
Taiwan Semiconductor Manufacturing Company, Ltd.
42118
5
Technische Universiteit Delft
719
5
Purdue Research Foundation
3564
4
Ebara Corporation
2143
3
Hermes Microvision, Inc.
25
3
Mochii, Inc.
17
3
Other owners 52