Patent holdings for IPC class H01J 37/12

Total number of patents in this class: 396

10-year publication summary

29
17
26
33
46
39
33
30
30
11
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
ASML Netherlands B.V.
7762
107
Hitachi High-Tech Corporation
5669
33
NuFlare Technology, Inc.
909
20
Carl Zeiss MultiSEM GmbH
173
18
Varian Semiconductor Equipment Associates, Inc.
1197
17
Applied Materials, Inc.
20085
16
Hitachi High-Technologies Corporation
1992
13
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
157
13
FEI Company
1045
11
KLA Corporation
1790
10
Mapper Lithography IP B.V.
131
7
Canon Kabushiki Kaisha
7237
7
Carl Zeiss Microscopy GmbH
1267
6
Hermes Microvision Incorporated B.V.
123
6
KLA-Tencor Corporation
2523
5
Korea Research Institute of Standards and Science
684
5
NuFlare Technology America, Inc.
23
5
Hitachi High-Tech Analysis Corporation
284
5
Axcelis Technologies, Inc.
424
4
JEOL Ltd.
617
4
Other owners 84