Patent holdings for IPC class H01J 37/12

Total number of patents in this class: 406

10-year publication summary

29
17
26
33
46
39
33
30
30
25
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
ASML Netherlands B.V.
8005
113
Hitachi High-Tech Corporation
5957
33
NuFlare Technology, Inc.
927
21
Carl Zeiss MultiSEM GmbH
191
21
Applied Materials, Inc.
20552
18
Varian Semiconductor Equipment Associates, Inc.
1179
17
Hitachi High-Technologies Corporation
1986
13
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
157
13
FEI Company
1062
12
KLA Corporation
1874
10
Canon Kabushiki Kaisha
7373
7
Carl Zeiss Microscopy GmbH
1290
6
Mapper Lithography IP B.V.
129
6
Hermes Microvision Incorporated B.V.
122
6
KLA-Tencor Corporation
2517
5
Korea Research Institute of Standards and Science
691
5
NuFlare Technology America, Inc.
23
5
Hitachi High-Tech Analysis Corporation
286
5
Axcelis Technologies, Inc.
422
4
JEOL Ltd.
625
4
Other owners 82