- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/20 - Means for supporting or positioning the object or the materialMeans for adjusting diaphragms or lenses associated with the support
Patent holdings for IPC class H01J 37/20
Total number of patents in this class: 2373
10-year publication summary
|
164
|
153
|
186
|
182
|
195
|
193
|
164
|
163
|
174
|
62
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Hitachi High-Tech Corporation | 5660 |
307 |
| Hitachi High-Technologies Corporation | 1992 |
199 |
| FEI Company | 1042 |
182 |
| ASML Netherlands B.V. | 7749 |
132 |
| NuFlare Technology, Inc. | 908 |
81 |
| Applied Materials, Inc. | 20053 |
67 |
| JEOL Ltd. | 616 |
67 |
| Protochips, Inc. | 79 |
54 |
| Hitachi High-Tech Analysis Corporation | 286 |
45 |
| Carl Zeiss Microscopy GmbH | 1268 |
43 |
| Applied Materials Israel, Ltd. | 647 |
37 |
| Hitachi, Ltd. | 15904 |
31 |
| Varian Semiconductor Equipment Associates, Inc. | 1197 |
31 |
| Axcelis Technologies, Inc. | 425 |
30 |
| Tokyo Electron Limited | 13553 |
27 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 47419 |
18 |
| Nikon Corporation | 7306 |
17 |
| Samsung Electronics Co., Ltd. | 154120 |
16 |
| National Institute of Advanced Industrial Science and Technology | 3793 |
16 |
| The Regents of the University of California | 20556 |
14 |
| Other owners | 959 |