Patent holdings for IPC class H01J 37/31

Total number of patents in this class: 114

10-year publication summary

11
10
9
13
19
11
13
7
5
3
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
FEI Company
995
13
NuFlare Technology, Inc.
886
8
Hitachi High-Tech Corporation
5482
7
Hitachi High-Tech Analysis Corporation
283
5
Taiwan Semiconductor Manufacturing Company, Ltd.
46182
4
ASML Netherlands B.V.
7593
4
Carl Zeiss Microscopy GmbH
1229
4
Gatan, Inc.
111
4
JEOL Ltd.
600
4
Varian Semiconductor Equipment Associates, Inc.
1224
3
Tel Manufacturing and Engineering of America, Inc.
138
3
Shanghai Huali Integrated Circuit Corporation
202
3
Hon Hai Precision Industry Co., Ltd.
4024
2
Applied Materials, Inc.
19298
2
Applied Materials Israel, Ltd.
619
2
Board of Regents, The University of Texas System
5946
2
Tsinghua University
6023
2
Axcelis Technologies, Inc.
424
2
E.A. Fischione Instruments, Inc.
14
2
NexGen Semi Holding, Inc.
23
2
Other owners 36