Patent holdings for IPC class H01J 37/31

Total number of patents in this class: 123

10-year publication summary

10
9
13
19
11
13
7
9
3
5
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
FEI Company
1062
15
NuFlare Technology, Inc.
928
8
Hitachi High-Tech Corporation
5969
8
Taiwan Semiconductor Manufacturing Company, Ltd.
48861
5
JEOL Ltd.
626
5
Hitachi High-Tech Analysis Corporation
286
5
ASML Netherlands B.V.
8019
4
Carl Zeiss Microscopy GmbH
1296
4
Gatan, Inc.
112
4
Applied Materials, Inc.
20579
3
Varian Semiconductor Equipment Associates, Inc.
1177
3
Tel Manufacturing and Engineering of America, Inc.
155
3
Shanghai Huali Integrated Circuit Corporation
242
3
Hon Hai Precision Industry Co., Ltd.
4019
2
Applied Materials Israel, Ltd.
688
2
Board of Regents, The University of Texas System
6172
2
Tsinghua University
6248
2
Axcelis Technologies, Inc.
425
2
E.A. Fischione Instruments, Inc.
14
2
IMS Nanofabrication GmbH
61
2
Other owners 39