- All sections
- C - Chemistrymetallurgy
- C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 14/50 - Substrate holders
Patent holdings for IPC class C23C 14/50
Total number of patents in this class: 1769
10-year publication summary
|
136
|
144
|
165
|
170
|
133
|
168
|
141
|
185
|
145
|
93
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 20459 |
329 |
| Tokyo Electron Limited | 13854 |
68 |
| ULVAC, Inc. | 1344 |
53 |
| Oerlikon Surface Solutions AG, Pfaffikon | 558 |
44 |
| Samsung Display Co., Ltd. | 38791 |
43 |
| Canon Anelva Corporation | 684 |
43 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 48539 |
42 |
| Canon Tokki Corporation | 110 |
27 |
| Beijing Naura Microelectronics Equipment Co., Ltd. | 743 |
26 |
| Evatec AG | 155 |
25 |
| Boe Technology Group Co., Ltd. | 44250 |
24 |
| Rtx Corporation | 10116 |
23 |
| Corning Incorporated | 10511 |
22 |
| NHK Spring Co., Ltd. | 1989 |
13 |
| Kyocera Corporation | 14402 |
12 |
| Lam Research Corporation | 5652 |
11 |
| Intevac, Inc. | 128 |
11 |
| Tech M3, Inc. | 46 |
11 |
| Shibaura Mechatronics Corporation | 299 |
10 |
| Shincron Co., Ltd. | 91 |
10 |
| Other owners | 922 |