- All sections
- C - Chemistry; metallurgy
- C23C - Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 14/50 - Substrate holders
Patent holdings for IPC class C23C 14/50
Total number of patents in this class: 1545
10-year publication summary
|
108
|
136
|
143
|
165
|
170
|
132
|
163
|
136
|
181
|
7
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 17745 |
301 |
| Tokyo Electron Limited | 12115 |
61 |
| ULVAC, Inc. | 1403 |
50 |
| Oerlikon Surface Solutions AG, Pfaffikon | 558 |
45 |
| Canon Anelva Corporation | 682 |
44 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 40608 |
31 |
| Samsung Display Co., Ltd. | 32798 |
29 |
| Boe Technology Group Co., Ltd. | 38881 |
24 |
| Evatec AG | 150 |
23 |
| Beijing Naura Microelectronics Equipment Co., Ltd. | 504 |
22 |
| Rtx Corporation | 9109 |
21 |
| Corning Incorporated | 10125 |
20 |
| Canon Tokki Corporation | 73 |
16 |
| Lam Research Corporation | 5001 |
12 |
| Intevac, Inc. | 135 |
11 |
| Kyocera Corporation | 13344 |
10 |
| Shibaura Mechatronics Corporation | 282 |
10 |
| Shincron Co., Ltd. | 86 |
10 |
| Tech M3, Inc. | 42 |
10 |
| NHK Spring Co., Ltd. | 1769 |
9 |
| Other owners | 786 |