- All sections
- C - Chemistrymetallurgy
- C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 14/52 - Means for observation of the coating process
Patent holdings for IPC class C23C 14/52
Total number of patents in this class: 140
10-year publication summary
|
7
|
9
|
8
|
10
|
14
|
8
|
13
|
16
|
19
|
3
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 19683 |
15 |
| ULVAC, Inc. | 1372 |
7 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 46613 |
6 |
| Samsung Display Co., Ltd. | 37252 |
5 |
| Canon Tokki Corporation | 100 |
4 |
| Mochii, Inc. | 19 |
4 |
| Tokyo Electron Limited | 13380 |
3 |
| Nitto Denko Corporation | 8410 |
3 |
| Boe Technology Group Co., Ltd. | 42489 |
3 |
| Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V. | 1826 |
3 |
| Singulus Technologies AG | 108 |
3 |
| Sunic System, Ltd. | 27 |
3 |
| LG Electronics Inc. | 74388 |
2 |
| Lam Research Corporation | 5437 |
2 |
| Arcam AB | 202 |
2 |
| Chengdu BOE Optoelectronics Technology Co., Ltd. | 7124 |
2 |
| CVD Equipment Corporation | 26 |
2 |
| Entegris, Inc. | 1957 |
2 |
| Lamina Technologies S.A. | 11 |
2 |
| Leybold Optics GmbH | 43 |
2 |
| Other owners | 65 |