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  • All sections
  • C - Chemistrymetallurgy
  • C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
  • C23C 14/54 - Controlling or regulating the coating process

Patent holdings for IPC class C23C 14/54

Total number of patents in this class: 1903

10-year publication summary

148
156
175
184
163
170
200
149
171
79
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Applied Materials, Inc.
18344
280
Tokyo Electron Limited
12477
64
Taiwan Semiconductor Manufacturing Company, Ltd.
41951
57
Boe Technology Group Co., Ltd.
40474
42
Samsung Display Co., Ltd.
34120
37
Oerlikon Surface Solutions AG, Pfaffikon
541
31
ULVAC, Inc.
1388
30
Canon Anelva Corporation
686
29
Beijing Naura Microelectronics Equipment Co., Ltd.
562
28
Aixtron SE
315
19
Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
1765
18
Elevated Materials US LLC
115
17
Flisom AG
77
16
Shincron Co., Ltd.
86
15
Kokusai Electric Corporation
1954
15
Halliburton Energy Services, Inc.
20697
14
Nitto Denko Corporation
8169
14
Lam Research Corporation
5155
13
Rtx Corporation
9288
13
Evatec AG
151
12
Other owners 1139

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