- All sections
- G - Physics
- G01N - Investigating or analysing materials by determining their chemical or physical properties
- G01N 21/956 - Inspecting patterns on the surface of objects
Patent holdings for IPC class G01N 21/956
Total number of patents in this class: 2852
10-year publication summary
|
173
|
206
|
249
|
227
|
197
|
190
|
176
|
163
|
159
|
123
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| ASML Netherlands B.V. | 7987 |
287 |
| KLA-Tencor Corporation | 2517 |
217 |
| KLA Corporation | 1871 |
170 |
| Hitachi High-Technologies Corporation | 1987 |
158 |
| Hitachi High-Tech Corporation | 5941 |
148 |
| Samsung Electronics Co., Ltd. | 158605 |
70 |
| NuFlare Technology, Inc. | 927 |
63 |
| Carl Zeiss SMT GmbH | 3356 |
56 |
| Nikon Corporation | 7229 |
45 |
| Koh Young Technology Inc. | 368 |
45 |
| Tokyo Electron Limited | 13884 |
44 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 48629 |
40 |
| Nova Ltd. | 195 |
35 |
| CKD Corporation | 468 |
33 |
| Toray Engineering Co., Ltd. | 525 |
32 |
| ASML Holding N.V. | 487 |
31 |
| Sumco Corporation | 1106 |
28 |
| Omron Corporation | 7402 |
24 |
| Corning Incorporated | 10518 |
22 |
| Applied Materials Israel, Ltd. | 688 |
21 |
| Other owners | 1283 |