- All sections
- G - Physics
- G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devicesmaterials therefororiginals thereforapparatus specially adapted therefor
- G03F 1/80 - Etching
Patent holdings for IPC class G03F 1/80
Total number of patents in this class: 450
10-year publication summary
|
46
|
38
|
48
|
34
|
24
|
29
|
38
|
43
|
32
|
16
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Taiwan Semiconductor Manufacturing Company, Ltd. | 48302 |
74 |
| Hoya Corporation | 2721 |
66 |
| Shin-Etsu Chemical Co., Ltd. | 6096 |
35 |
| Applied Materials, Inc. | 20375 |
30 |
| Agc, Inc. | 5524 |
22 |
| Samsung Electronics Co., Ltd. | 157719 |
15 |
| Tokyo Electron Limited | 13807 |
11 |
| Kioxia Corporation | 10815 |
11 |
| Lam Research Corporation | 5635 |
10 |
| Samsung Display Co., Ltd. | 38627 |
8 |
| ASML Netherlands B.V. | 7925 |
7 |
| Exogenesis Corporation | 68 |
7 |
| LG Chem, Ltd. | 17921 |
6 |
| International Business Machines Corporation | 62634 |
6 |
| Carl Zeiss SMT GmbH | 3332 |
6 |
| Tekscend Photomask Corp. | 34 |
6 |
| Boe Technology Group Co., Ltd. | 44029 |
5 |
| S&S Tech Co., Ltd. | 33 |
5 |
| Dai Nippon Printing Co., Ltd. | 4238 |
4 |
| The Regents of the University of California | 20745 |
3 |
| Other owners | 113 |