- All sections
- G - Physics
- G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devicesmaterials therefororiginals thereforapparatus specially adapted therefor
- G03F 1/84 - Inspecting
Patent holdings for IPC class G03F 1/84
Total number of patents in this class: 700
10-year publication summary
|
48
|
49
|
67
|
52
|
59
|
46
|
44
|
53
|
75
|
24
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Carl Zeiss SMT GmbH | 3201 |
145 |
| ASML Netherlands B.V. | 7710 |
77 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 47071 |
52 |
| KLA-Tencor Corporation | 2524 |
50 |
| KLA Corporation | 1781 |
44 |
| Hoya Corporation | 2738 |
31 |
| Samsung Electronics Co., Ltd. | 153093 |
28 |
| NuFlare Technology, Inc. | 907 |
19 |
| ASML Holding N.V. | 488 |
17 |
| Shin-Etsu Chemical Co., Ltd. | 5918 |
15 |
| Carl Zeiss SMS Ltd. | 54 |
13 |
| LaserTec Corporation | 111 |
12 |
| Bruker Nano, Inc. | 358 |
8 |
| Kioxia Corporation | 10704 |
8 |
| Applied Materials Israel, Ltd. | 643 |
7 |
| Nikon Corporation | 7237 |
7 |
| Corning Incorporated | 10406 |
7 |
| Carl Zeiss AG | 913 |
6 |
| IUCF-HYU (Industry-University Cooperation Foundation Hanyang University) | 1515 |
6 |
| V Technology Co., Ltd. | 380 |
6 |
| Other owners | 142 |