- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/02 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof Details
Patent holdings for IPC class H01J 37/02
Total number of patents in this class: 357
10-year publication summary
|
21
|
35
|
23
|
17
|
23
|
22
|
20
|
28
|
29
|
12
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| ASML Netherlands B.V. | 7984 |
67 |
| Hitachi High-Tech Corporation | 5918 |
23 |
| FEI Company | 1057 |
19 |
| Varian Semiconductor Equipment Associates, Inc. | 1180 |
16 |
| Carl Zeiss SMT GmbH | 3352 |
13 |
| Applied Materials, Inc. | 20467 |
12 |
| Axcelis Technologies, Inc. | 422 |
10 |
| Hermes Microvision Incorporated B.V. | 122 |
9 |
| Carl Zeiss MultiSEM GmbH | 189 |
9 |
| NuFlare Technology, Inc. | 927 |
8 |
| Tokyo Electron Limited | 13871 |
7 |
| Lam Research Corporation | 5655 |
7 |
| Applied Materials Israel, Ltd. | 681 |
6 |
| Hitachi High-Tech Analysis Corporation | 285 |
6 |
| Carl Zeiss Microscopy GmbH | 1280 |
5 |
| KLA Corporation | 1868 |
5 |
| Samsung Electronics Co., Ltd. | 158442 |
4 |
| Howard Hughes Medical Institute | 232 |
4 |
| ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | 157 |
3 |
| JEOL Ltd. | 625 |
3 |
| Other owners | 121 |