Patent holdings for IPC class H01J 37/05

Total number of patents in this class: 361

10-year publication summary

21
32
41
41
29
26
21
17
21
15
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
Applied Materials, Inc.
20363
33
Hitachi High-Technologies Corporation
1987
25
Hitachi High-Tech Corporation
5819
25
FEI Company
1052
22
ASML Netherlands B.V.
7906
20
Axcelis Technologies, Inc.
423
19
mi2-factory GmbH
36
17
Varian Semiconductor Equipment Associates, Inc.
1187
15
Exogenesis Corporation
68
15
JEOL Ltd.
622
13
NuFlare Technology, Inc.
918
9
Carl Zeiss MultiSEM GmbH
182
9
KLA Corporation
1844
8
Nissin ION Equipment Co., Ltd.
97
7
Sumitomo Heavy Industries ION Technology Co., Ltd.
121
7
Applied Materials Israel, Ltd.
675
6
Gatan, Inc.
112
6
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
157
5
Battelle Memorial Institute
2603
4
Scienta Omicron AB
20
4
Other owners 92