Patent holdings for IPC class H01J 37/06

Total number of patents in this class: 389

10-year publication summary

28
32
32
45
25
16
25
25
34
16
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
5857
39
Hitachi High-Technologies Corporation
1987
20
Denka Company Limited
2728
20
ASML Netherlands B.V.
7939
19
NuFlare Technology, Inc.
923
19
KLA-Tencor Corporation
2518
17
FEI Company
1054
10
KLA Corporation
1856
10
National Institute for Materials Science
1086
7
ULVAC, Inc.
1343
6
Carl Zeiss MultiSEM GmbH
186
6
Samsung Electronics Co., Ltd.
157946
5
Taiwan Semiconductor Manufacturing Company, Ltd.
48438
5
Nikon Corporation
7226
5
Hamamatsu Photonics K.K.
4686
5
Carl Zeiss Microscopy GmbH
1273
5
Fermi Forward Discovery Group, LLC
111
5
Advantest Corporation
1693
4
38th Research Institute, China Electronics Technology Group Corporation
55
4
Denki Kagaku Kogyo Kabushiki Kaisha
578
4
Other owners 174