- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/06 - Electron sources; Electron guns
Patent holdings for IPC class H01J 37/06
Total number of patents in this class: 348
10-year publication summary
|
34
|
28
|
32
|
32
|
45
|
25
|
15
|
23
|
24
|
2
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Hitachi High-Tech Corporation | 5050 |
34 |
| Hitachi High-Technologies Corporation | 2018 |
20 |
| ASML Netherlands B.V. | 7171 |
18 |
| NuFlare Technology, Inc. | 806 |
18 |
| KLA-Tencor Corporation | 2550 |
17 |
| Denka Company Limited | 2459 |
14 |
| FEI Company | 895 |
8 |
| KLA Corporation | 1402 |
7 |
| National Institute for Materials Science | 1108 |
6 |
| ULVAC, Inc. | 1403 |
6 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 40608 |
5 |
| Nikon Corporation | 7123 |
5 |
| Hamamatsu Photonics K.K. | 4304 |
5 |
| Advantest Corporation | 1843 |
5 |
| Carl Zeiss Microscopy GmbH | 1172 |
5 |
| 38th Research Institute, China Electronics Technology Group Corporation | 46 |
4 |
| Denki Kagaku Kogyo Kabushiki Kaisha | 649 |
4 |
| Photo Electron Soul Inc. | 31 |
4 |
| Carl Zeiss MultiSEM GmbH | 112 |
4 |
| Fermi Forward Discovery Group, LLC | 84 |
4 |
| Other owners | 155 |