- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/09 - DiaphragmsShields associated with electron- or ion-optical arrangementsCompensation of disturbing fields
Patent holdings for IPC class H01J 37/09
Total number of patents in this class: 469
10-year publication summary
|
23
|
32
|
32
|
34
|
40
|
39
|
46
|
41
|
38
|
27
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| ASML Netherlands B.V. | 7381 |
63 |
| Hitachi High-Tech Corporation | 5302 |
45 |
| Hitachi High-Technologies Corporation | 2004 |
38 |
| NuFlare Technology, Inc. | 841 |
36 |
| Carl Zeiss MultiSEM GmbH | 134 |
24 |
| Carl Zeiss Microscopy GmbH | 1203 |
17 |
| ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | 158 |
16 |
| Applied Materials, Inc. | 18589 |
15 |
| Applied Materials Israel, Ltd. | 614 |
15 |
| FEI Company | 943 |
14 |
| Axcelis Technologies, Inc. | 408 |
12 |
| Hitachi High-Tech Science Corporation | 290 |
9 |
| JEOL Ltd. | 579 |
9 |
| Mapper Lithography IP B.V. | 135 |
8 |
| Hitachi, Ltd. | 15476 |
7 |
| Varian Semiconductor Equipment Associates, Inc. | 1231 |
7 |
| Carl Zeiss SMT GmbH | 2976 |
7 |
| KLA Corporation | 1543 |
7 |
| IMS Nanofabrication GmbH | 59 |
5 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 113 |
5 |
| Other owners | 110 |