Patent holdings for IPC class H01J 37/18

Total number of patents in this class: 474

10-year publication summary

47
43
40
35
30
37
37
29
28
17
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
5323
67
Hitachi High-Technologies Corporation
2004
63
ASML Netherlands B.V.
7392
35
FEI Company
944
31
Axcelis Technologies, Inc.
412
16
JEOL Ltd.
581
15
Nikon Corporation
7170
12
V Technology Co., Ltd.
384
12
Carl Zeiss Microscopy GmbH
1205
8
Carl Zeiss Microscopy, LLC
27
7
Hitachi High-Tech Science Corporation
289
6
Applied Materials, Inc.
18658
6
Applied Materials Israel, Ltd.
611
6
Tokyo Electron Limited
12733
6
Canon Anelva Corporation
686
5
Mapper Lithography IP B.V.
134
5
Protochips, Inc.
76
5
bioMerieux, Inc.
441
4
Hermes Microvision, Inc.
25
4
Intevac, Inc.
136
4
Other owners 157