Patent holdings for IPC class H01J 37/18

Total number of patents in this class: 488

10-year publication summary

43
40
34
30
37
37
28
27
28
4
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
5596
67
Hitachi High-Technologies Corporation
1993
63
ASML Netherlands B.V.
7689
35
FEI Company
1025
32
Axcelis Technologies, Inc.
431
16
JEOL Ltd.
613
16
Nikon Corporation
7263
12
V Technology Co., Ltd.
380
12
Applied Materials, Inc.
19849
10
Carl Zeiss Microscopy GmbH
1246
8
Carl Zeiss Microscopy, LLC
27
7
Applied Materials Israel, Ltd.
638
6
Tokyo Electron Limited
13452
6
Canon Anelva Corporation
686
5
Mapper Lithography IP B.V.
131
5
Mochii, Inc.
19
5
Protochips, Inc.
79
5
Airsem Technologies Ltd
13
5
Hitachi High-Tech Analysis Corporation
286
5
bioMerieux, Inc.
449
4
Other owners 164