Patent holdings for IPC class H01J 37/18

Total number of patents in this class: 507

10-year publication summary

43
40
35
30
37
37
29
28
27
22
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
5987
68
Hitachi High-Technologies Corporation
1986
63
ASML Netherlands B.V.
8033
37
FEI Company
1063
35
Axcelis Technologies, Inc.
425
16
JEOL Ltd.
627
16
Nikon Corporation
7229
12
V Technology Co., Ltd.
381
12
Carl Zeiss Microscopy GmbH
1302
10
Applied Materials, Inc.
20601
9
Carl Zeiss Microscopy, LLC
27
7
Applied Materials Israel, Ltd.
690
6
Tokyo Electron Limited
13956
6
bioMerieux, Inc.
453
5
Canon Anelva Corporation
689
5
Mapper Lithography IP B.V.
129
5
Mochii, Inc.
19
5
Protochips, Inc.
80
5
Carl Zeiss MultiSEM GmbH
194
5
Airsem Technologies Ltd
13
5
Other owners 175