- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/66 - Testing or measuring during manufacture or treatment
Patent holdings for IPC class H01L 21/66
Total number of patents in this class: 13966
10-year publication summary
|
1136
|
1155
|
1148
|
1132
|
996
|
1050
|
983
|
933
|
977
|
412
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Taiwan Semiconductor Manufacturing Company, Ltd. | 48302 |
1178 |
| Applied Materials, Inc. | 20375 |
755 |
| KLA-Tencor Corporation | 2518 |
733 |
| Tokyo Electron Limited | 13807 |
645 |
| Samsung Electronics Co., Ltd. | 157719 |
559 |
| KLA Corporation | 1849 |
359 |
| Hitachi High-Technologies Corporation | 1987 |
257 |
| Hitachi High-Tech Corporation | 5846 |
229 |
| International Business Machines Corporation | 62634 |
189 |
| ASML Netherlands B.V. | 7925 |
188 |
| Micron Technology, Inc. | 27657 |
185 |
| Lam Research Corporation | 5635 |
185 |
| Changxin Memory Technologies, Inc. | 4933 |
185 |
| Renesas Electronics Corporation | 5870 |
148 |
| Samsung Display Co., Ltd. | 38627 |
146 |
| Texas Instruments Incorporated | 19672 |
145 |
| Shin-Etsu Handotai Co., Ltd. | 1307 |
141 |
| Infineon Technologies AG | 8402 |
135 |
| Kioxia Corporation | 10815 |
127 |
| Mitsubishi Electric Corporation | 48018 |
125 |
| Other owners | 7352 |