• All sections
• H - Electricity
• H01L - Semiconductor devices not covered by class
• H01L 21/673 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components using specially adapted carriers

Patent holdings for IPC class H01L 21/673

Total number of patents in this class: 3097

10-year publication summary

Principal owners for this class