• All sections
• H - Electricity
• H01L - Semiconductor devices not covered by class
• H01L 21/673 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components using specially adapted carriers

Patent holdings for IPC class H01L 21/673

Total number of patents in this class: 2807

10-year publication summary

Principal owners for this class