- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/08 - Ion sourcesIon guns
Patent holdings for IPC class H01J 37/08
Total number of patents in this class: 1280
10-year publication summary
|
79
|
87
|
91
|
98
|
79
|
78
|
96
|
78
|
86
|
74
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 20459 |
209 |
| Varian Semiconductor Equipment Associates, Inc. | 1182 |
129 |
| Axcelis Technologies, Inc. | 422 |
104 |
| Hitachi High-Tech Corporation | 5903 |
60 |
| FEI Company | 1055 |
41 |
| Entegris, Inc. | 2008 |
34 |
| Hitachi High-Technologies Corporation | 1987 |
33 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 48539 |
32 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 121 |
26 |
| Nissin ION Equipment Co., Ltd. | 98 |
21 |
| Canon Anelva Corporation | 684 |
18 |
| Samsung Electronics Co., Ltd. | 158337 |
15 |
| Shine Technologies, LLC | 168 |
15 |
| Hitachi High-Tech Analysis Corporation | 285 |
15 |
| Praxair Technology, Inc. | 1215 |
14 |
| Massachusetts Institute of Technology | 10273 |
11 |
| Carl Zeiss Microscopy, LLC | 27 |
11 |
| Tel Manufacturing and Engineering of America, Inc. | 155 |
11 |
| Advanced ION Beam Technology, Inc. | 70 |
9 |
| Carl Zeiss Microscopy GmbH | 1275 |
9 |
| Other owners | 463 |