- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/08 - Ion sourcesIon guns
Patent holdings for IPC class H01J 37/08
Total number of patents in this class: 1268
10-year publication summary
|
78
|
87
|
90
|
98
|
79
|
78
|
94
|
78
|
87
|
38
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 19999 |
194 |
| Varian Semiconductor Equipment Associates, Inc. | 1198 |
131 |
| Axcelis Technologies, Inc. | 426 |
104 |
| Hitachi High-Tech Corporation | 5646 |
57 |
| FEI Company | 1037 |
40 |
| Entegris, Inc. | 1979 |
34 |
| Hitachi High-Technologies Corporation | 1992 |
33 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 47211 |
31 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 122 |
26 |
| Nissin ION Equipment Co., Ltd. | 96 |
22 |
| Canon Anelva Corporation | 686 |
18 |
| Hitachi High-Tech Analysis Corporation | 286 |
15 |
| Praxair Technology, Inc. | 1227 |
14 |
| Shine Technologies, LLC | 155 |
13 |
| Samsung Electronics Co., Ltd. | 153573 |
12 |
| Massachusetts Institute of Technology | 10196 |
11 |
| Carl Zeiss Microscopy, LLC | 27 |
11 |
| Tel Manufacturing and Engineering of America, Inc. | 144 |
11 |
| Advanced ION Beam Technology, Inc. | 69 |
9 |
| Carl Zeiss Microscopy GmbH | 1266 |
9 |
| Other owners | 473 |