- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/08 - Ion sourcesIon guns
Patent holdings for IPC class H01J 37/08
Total number of patents in this class: 1251
10-year publication summary
|
78
|
87
|
90
|
98
|
79
|
78
|
94
|
77
|
87
|
18
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 19683 |
183 |
| Varian Semiconductor Equipment Associates, Inc. | 1212 |
133 |
| Axcelis Technologies, Inc. | 430 |
104 |
| Hitachi High-Tech Corporation | 5571 |
59 |
| FEI Company | 1019 |
40 |
| Entegris, Inc. | 1957 |
34 |
| Hitachi High-Technologies Corporation | 1993 |
33 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 46613 |
30 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 119 |
25 |
| Nissin ION Equipment Co., Ltd. | 95 |
21 |
| Canon Anelva Corporation | 690 |
18 |
| Hitachi High-Tech Analysis Corporation | 285 |
15 |
| Praxair Technology, Inc. | 1258 |
14 |
| Shine Technologies, LLC | 152 |
13 |
| Samsung Electronics Co., Ltd. | 151485 |
11 |
| Massachusetts Institute of Technology | 10172 |
11 |
| Carl Zeiss Microscopy, LLC | 27 |
11 |
| Tel Manufacturing and Engineering of America, Inc. | 139 |
10 |
| Advanced ION Beam Technology, Inc. | 69 |
9 |
| Carl Zeiss Microscopy GmbH | 1241 |
9 |
| Other owners | 468 |