- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/08 - Ion sourcesIon guns
Patent holdings for IPC class H01J 37/08
Total number of patents in this class: 1243
10-year publication summary
|
80
|
78
|
87
|
90
|
98
|
79
|
78
|
94
|
77
|
87
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 19298 |
175 |
| Varian Semiconductor Equipment Associates, Inc. | 1224 |
136 |
| Axcelis Technologies, Inc. | 424 |
104 |
| Hitachi High-Tech Corporation | 5482 |
58 |
| FEI Company | 995 |
39 |
| Entegris, Inc. | 1914 |
34 |
| Hitachi High-Technologies Corporation | 1996 |
33 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 46182 |
30 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 119 |
25 |
| Nissin ION Equipment Co., Ltd. | 89 |
21 |
| Canon Anelva Corporation | 690 |
18 |
| Hitachi High-Tech Analysis Corporation | 283 |
15 |
| Praxair Technology, Inc. | 1272 |
14 |
| Shine Technologies, LLC | 147 |
13 |
| Samsung Electronics Co., Ltd. | 149198 |
11 |
| Massachusetts Institute of Technology | 10150 |
11 |
| Carl Zeiss Microscopy, LLC | 27 |
11 |
| Advanced ION Beam Technology, Inc. | 70 |
10 |
| Tel Manufacturing and Engineering of America, Inc. | 138 |
10 |
| Carl Zeiss Microscopy GmbH | 1229 |
9 |
| Other owners | 466 |