Patent holdings for IPC class H01J 37/147

Total number of patents in this class: 1391

10-year publication summary

88
95
136
127
116
102
136
114
126
36
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
ASML Netherlands B.V.
7762
165
Hitachi High-Tech Corporation
5669
152
NuFlare Technology, Inc.
909
114
Hitachi High-Technologies Corporation
1992
71
FEI Company
1045
56
Applied Materials, Inc.
20085
53
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
157
50
Carl Zeiss MultiSEM GmbH
173
45
Carl Zeiss Microscopy GmbH
1267
44
Axcelis Technologies, Inc.
424
41
JEOL Ltd.
617
39
Applied Materials Israel, Ltd.
648
32
Varian Semiconductor Equipment Associates, Inc.
1197
29
KLA Corporation
1790
29
KLA-Tencor Corporation
2523
22
Sumitomo Heavy Industries ION Technology Co., Ltd.
122
20
Hitachi, Ltd.
15918
16
Exogenesis Corporation
68
16
Carl Zeiss SMT GmbH
3235
15
Taiwan Semiconductor Manufacturing Company, Ltd.
47518
13
Other owners 369