- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/147 - Arrangements for directing or deflecting the discharge along a desired path
Patent holdings for IPC class H01J 37/147
Total number of patents in this class: 1391
10-year publication summary
|
88
|
95
|
136
|
127
|
116
|
102
|
136
|
114
|
126
|
36
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| ASML Netherlands B.V. | 7762 |
165 |
| Hitachi High-Tech Corporation | 5669 |
152 |
| NuFlare Technology, Inc. | 909 |
114 |
| Hitachi High-Technologies Corporation | 1992 |
71 |
| FEI Company | 1045 |
56 |
| Applied Materials, Inc. | 20085 |
53 |
| ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | 157 |
50 |
| Carl Zeiss MultiSEM GmbH | 173 |
45 |
| Carl Zeiss Microscopy GmbH | 1267 |
44 |
| Axcelis Technologies, Inc. | 424 |
41 |
| JEOL Ltd. | 617 |
39 |
| Applied Materials Israel, Ltd. | 648 |
32 |
| Varian Semiconductor Equipment Associates, Inc. | 1197 |
29 |
| KLA Corporation | 1790 |
29 |
| KLA-Tencor Corporation | 2523 |
22 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 122 |
20 |
| Hitachi, Ltd. | 15918 |
16 |
| Exogenesis Corporation | 68 |
16 |
| Carl Zeiss SMT GmbH | 3235 |
15 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 47518 |
13 |
| Other owners | 369 |