Patent holdings for IPC class H01J 37/16

Total number of patents in this class: 347

10-year publication summary

32
24
19
12
16
13
17
18
26
4
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
Hitachi High-Technologies Corporation
1993
70
Hitachi High-Tech Corporation
5613
47
ASML Netherlands B.V.
7697
20
FEI Company
1028
16
Applied Materials, Inc.
19887
13
Global Plasma Solutions, Inc.
75
11
JEOL Ltd.
614
10
Tokyo Electron Limited
13463
9
Varian Semiconductor Equipment Associates, Inc.
1202
7
Carl Zeiss Microscopy GmbH
1249
7
Protochips, Inc.
79
6
Entegris, Inc.
1960
5
Mapper Lithography IP B.V.
131
5
Nikon Corporation
7256
4
Intelligent Virus Imaging Inc.
34
4
Tetra Laval Holdings & Finance S.A.
2185
4
V Technology Co., Ltd.
380
4
Taiwan Semiconductor Manufacturing Company, Ltd.
46952
3
Carl Zeiss SMT GmbH
3190
3
Ebara Corporation
2266
3
Other owners 96