- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/16 - VesselsContainers
Patent holdings for IPC class H01J 37/16
Total number of patents in this class: 349
10-year publication summary
|
32
|
24
|
19
|
12
|
17
|
15
|
17
|
18
|
26
|
9
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Hitachi High-Technologies Corporation | 1987 |
70 |
| Hitachi High-Tech Corporation | 5819 |
47 |
| ASML Netherlands B.V. | 7906 |
20 |
| FEI Company | 1052 |
16 |
| Applied Materials, Inc. | 20363 |
13 |
| Global Plasma Solutions, Inc. | 75 |
11 |
| JEOL Ltd. | 622 |
10 |
| Tokyo Electron Limited | 13796 |
9 |
| Carl Zeiss Microscopy GmbH | 1271 |
7 |
| Varian Semiconductor Equipment Associates, Inc. | 1187 |
6 |
| Protochips, Inc. | 80 |
6 |
| Entegris, Inc. | 2008 |
5 |
| Mapper Lithography IP B.V. | 129 |
5 |
| Nikon Corporation | 7235 |
4 |
| Axcelis Technologies, Inc. | 423 |
4 |
| Tetra Laval Holdings & Finance S.A. | 2228 |
4 |
| V Technology Co., Ltd. | 380 |
4 |
| Carl Zeiss MultiSEM GmbH | 182 |
4 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 48248 |
3 |
| Carl Zeiss SMT GmbH | 3328 |
3 |
| Other owners | 98 |