Patent holdings for IPC class H01J 37/16

Total number of patents in this class: 331

10-year publication summary

31
32
24
19
12
17
16
17
17
12
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Hitachi High-Technologies Corporation
2004
70
Hitachi High-Tech Corporation
5310
47
ASML Netherlands B.V.
7385
19
FEI Company
943
14
Global Plasma Solutions, Inc.
76
11
Applied Materials, Inc.
18621
10
Tokyo Electron Limited
12712
9
JEOL Ltd.
580
8
Varian Semiconductor Equipment Associates, Inc.
1231
7
Carl Zeiss Microscopy GmbH
1203
6
Protochips, Inc.
76
6
Mapper Lithography IP B.V.
134
5
Nikon Corporation
7163
4
Entegris, Inc.
1868
4
Intelligent Virus Imaging Inc.
38
4
Tetra Laval Holdings & Finance S.A.
2146
4
V Technology Co., Ltd.
385
4
Taiwan Semiconductor Manufacturing Company, Ltd.
42704
3
Ebara Corporation
2169
3
Samsung Electronics Co., Ltd.
146092
2
Other owners 91