Patent holdings for IPC class H01J 37/16

Total number of patents in this class: 342

10-year publication summary

31
32
24
19
12
16
14
17
18
22
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Hitachi High-Technologies Corporation
1996
70
Hitachi High-Tech Corporation
5432
47
ASML Netherlands B.V.
7545
19
FEI Company
978
15
Applied Materials, Inc.
19119
12
Global Plasma Solutions, Inc.
74
11
JEOL Ltd.
599
10
Tokyo Electron Limited
13063
9
Varian Semiconductor Equipment Associates, Inc.
1229
7
Carl Zeiss Microscopy GmbH
1228
6
Protochips, Inc.
79
6
Entegris, Inc.
1907
5
Mapper Lithography IP B.V.
132
5
Nikon Corporation
7308
4
Intelligent Virus Imaging Inc.
37
4
Tetra Laval Holdings & Finance S.A.
2176
4
V Technology Co., Ltd.
379
4
Taiwan Semiconductor Manufacturing Company, Ltd.
45023
3
Ebara Corporation
2216
3
Axcelis Technologies, Inc.
428
3
Other owners 95