Patent holdings for IPC class H01J 37/21

Total number of patents in this class: 343

10-year publication summary

23
22
18
33
27
34
37
33
30
6
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
5065
63
ASML Netherlands B.V.
7179
31
Hitachi High-Technologies Corporation
2018
30
FEI Company
896
21
Carl Zeiss Microscopy GmbH
1175
18
Applied Materials, Inc.
17779
15
Applied Materials Israel, Ltd.
578
14
Carl Zeiss MultiSEM GmbH
113
12
NuFlare Technology, Inc.
809
11
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
153
10
JEOL Ltd.
562
10
KLA Corporation
1404
9
Hitachi High-Tech Science Corporation
323
5
Carl Zeiss SMT GmbH
2819
5
KLA-Tencor Corporation
2550
4
Hermes Microvision Incorporated B.V.
124
4
TASMIT, Inc.
60
4
Samsung Electronics Co., Ltd.
139302
3
Hitachi, Ltd.
15239
3
Ebara Corporation
2083
3
Other owners 68