Patent holdings for IPC class H01L 21/288

Total number of patents in this class: 1495

10-year publication summary

203
171
156
153
110
88
69
74
48
24
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Taiwan Semiconductor Manufacturing Company, Ltd.
42288
118
Tokyo Electron Limited
12599
83
Lam Research Corporation
5217
82
Applied Materials, Inc.
18475
63
International Business Machines Corporation
61144
36
Ebara Corporation
2160
31
Mitsubishi Electric Corporation
45899
28
Novellus Systems, Inc.
485
28
Alchimer
51
27
FUJIFILM Corporation
29273
26
Atotech Deutschland GmbH
559
26
Texas Instruments Incorporated
19481
24
Infineon Technologies AG
8210
22
Semiconductor Components Industries, L.L.C.
5252
21
BASF SE
20874
20
Nikon Corporation
7166
20
Konica Minolta Holdings, Inc.
931
18
Samsung Electronics Co., Ltd.
144675
17
Micron Technology, Inc.
26221
16
MacDermid Enthone Inc.
238
16
Other owners 773