• All sections
  • H - Electricity
  • H01L - Semiconductor devices not covered by class
  • H01L 21/68 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for positioning, orientation or alignment

Patent holdings for IPC class H01L 21/68

Total number of patents in this class: 3699

10-year publication summary

248
284
311
320
291
305
259
308
304
122
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
Applied Materials, Inc.
20085
260
Tokyo Electron Limited
13561
247
Taiwan Semiconductor Manufacturing Company, Ltd.
47518
166
Nikon Corporation
7298
155
Lam Research Corporation
5544
111
Samsung Electronics Co., Ltd.
154406
99
Screen Holdings Co., Ltd.
3105
90
Disco Corporation
1934
58
ASML Netherlands B.V.
7762
57
EV Group E. Thallner GmbH
420
54
Samsung Display Co., Ltd.
37960
52
Semes Co., Ltd.
1599
44
KLA Corporation
1790
41
Canon Inc.
42406
38
Boe Technology Group Co., Ltd.
43120
35
Brooks Automation US, LLC
338
35
Cowles Semi, LLC
70
31
ASM IP Holding B.V.
2299
29
Kawasaki Heavy Industries, Limited
1642
28
Changxin Memory Technologies, Inc.
4924
25
Other owners 2044