• All sections
  • H - Electricity
  • H01L - Semiconductor devices not covered by class
  • H01L 21/68 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for positioning, orientation or alignment

Patent holdings for IPC class H01L 21/68

Total number of patents in this class: 3487

10-year publication summary

177
248
285
311
320
293
301
254
291
191
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Applied Materials, Inc.
18706
234
Tokyo Electron Limited
12751
225
Nikon Corporation
7173
175
Taiwan Semiconductor Manufacturing Company, Ltd.
42863
155
Lam Research Corporation
5259
101
Samsung Electronics Co., Ltd.
146534
81
Screen Holdings Co., Ltd.
2831
68
EV Group E. Thallner GmbH
406
54
Disco Corporation
1864
52
ASML Netherlands B.V.
7394
51
Samsung Display Co., Ltd.
34842
41
Semes Co., Ltd.
1511
40
KLA Corporation
1561
36
Boe Technology Group Co., Ltd.
41267
33
Canon Inc.
40015
32
Brooks Automation US, LLC
348
31
Cowles Semi, LLC
70
31
Shanghai Micro Electronics Equipment (Group) Co., Ltd.
252
30
Kawasaki Heavy Industries, Limited
1633
27
ASM IP Holding B.V.
2080
27
Other owners 1963