- All sections
- C - Chemistry; metallurgy
- C23C - Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/52 - Controlling or regulating the coating process
Patent holdings for IPC class C23C 16/52
Total number of patents in this class: 2983
10-year publication summary
|
244
|
240
|
226
|
268
|
221
|
277
|
359
|
305
|
367
|
24
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Tokyo Electron Limited | 12067 |
402 |
| Kokusai Electric Corporation | 1896 |
384 |
| Applied Materials, Inc. | 17676 |
366 |
| Lam Research Corporation | 4978 |
261 |
| ASM IP Holding B.V. | 1874 |
202 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 40493 |
74 |
| Aixtron SE | 306 |
43 |
| Samsung Electronics Co., Ltd. | 138320 |
33 |
| Novellus Systems, Inc. | 510 |
24 |
| NuFlare Technology, Inc. | 804 |
19 |
| Jusung Engineering Co., Ltd. | 398 |
18 |
| Samsung Display Co., Ltd. | 32641 |
16 |
| MKS Instruments, Inc. | 686 |
15 |
| Fujikin Incorporated | 688 |
14 |
| Beneq Oy | 210 |
13 |
| Jiangsu Favored Nanotechnology Co., LTD | 156 |
13 |
| Entegris, Inc. | 1805 |
12 |
| Beijing Naura Microelectronics Equipment Co., Ltd. | 496 |
12 |
| HORIBA STEC, Co., Ltd. | 313 |
11 |
| Hitachi High-Tech Corporation | 5014 |
11 |
| Other owners | 1040 |