- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/00 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
Patent holdings for IPC class H01J 37/00
Total number of patents in this class: 473
10-year publication summary
|
67
|
52
|
40
|
50
|
35
|
32
|
15
|
27
|
6
|
4
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Hitachi High-Tech Corporation | 5282 |
34 |
| Applied Materials, Inc. | 18530 |
28 |
| Lam Research Corporation | 5217 |
28 |
| FEI Company | 941 |
26 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 42461 |
21 |
| NuFlare Technology, Inc. | 839 |
21 |
| ASML Netherlands B.V. | 7361 |
16 |
| Varian Semiconductor Equipment Associates, Inc. | 1231 |
14 |
| Tokyo Electron Limited | 12645 |
14 |
| Carl Zeiss Microscopy GmbH | 1202 |
12 |
| JEOL Ltd. | 578 |
11 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 113 |
10 |
| Hitachi High-Tech Science Corporation | 318 |
9 |
| ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | 158 |
7 |
| Applied Materials Israel, Ltd. | 611 |
6 |
| Panasonic Intellectual Property Management Co., Ltd. | 31221 |
6 |
| Hon Hai Precision Industry Co., Ltd. | 4039 |
5 |
| Tsinghua University | 5890 |
5 |
| Carl Zeiss SMT GmbH | 2965 |
5 |
| Axcelis Technologies, Inc. | 407 |
5 |
| Other owners | 190 |