- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/30 - Electron-beam or ion-beam tubes for localised treatment of objects
Patent holdings for IPC class H01J 37/30
Total number of patents in this class: 723
10-year publication summary
|
73
|
77
|
57
|
55
|
59
|
50
|
35
|
35
|
44
|
6
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| NuFlare Technology, Inc. | 824 |
58 |
| Hitachi High-Tech Corporation | 5172 |
47 |
| ASML Netherlands B.V. | 7247 |
46 |
| FEI Company | 921 |
43 |
| Varian Semiconductor Equipment Associates, Inc. | 1239 |
39 |
| Applied Materials, Inc. | 18231 |
29 |
| Hitachi High-Technologies Corporation | 2014 |
24 |
| Hitachi High-Tech Science Corporation | 325 |
21 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 41443 |
16 |
| Axcelis Technologies, Inc. | 399 |
11 |
| Applied Materials Israel, Ltd. | 588 |
10 |
| Carl Zeiss SMT GmbH | 2886 |
10 |
| Arcam AB | 203 |
10 |
| Multibeam Corporation | 24 |
10 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 109 |
10 |
| Carl Zeiss Microscopy GmbH | 1194 |
8 |
| Global Plasma Solutions, Inc. | 75 |
8 |
| Intel Corporation | 46550 |
7 |
| Fibics Incorporated | 25 |
7 |
| JEOL Ltd. | 566 |
7 |
| Other owners | 302 |