- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/30 - Electron-beam or ion-beam tubes for localised treatment of objects
Patent holdings for IPC class H01J 37/30
Total number of patents in this class: 743
10-year publication summary
|
77
|
57
|
55
|
59
|
48
|
35
|
35
|
44
|
33
|
9
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| NuFlare Technology, Inc. | 902 |
58 |
| Hitachi High-Tech Corporation | 5596 |
49 |
| FEI Company | 1025 |
46 |
| ASML Netherlands B.V. | 7689 |
44 |
| Applied Materials, Inc. | 19849 |
35 |
| Varian Semiconductor Equipment Associates, Inc. | 1208 |
35 |
| Hitachi High-Technologies Corporation | 1993 |
24 |
| Hitachi High-Tech Analysis Corporation | 286 |
21 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 46813 |
17 |
| Axcelis Technologies, Inc. | 431 |
13 |
| Multibeam Corporation | 29 |
12 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 122 |
12 |
| Carl Zeiss SMT GmbH | 3176 |
11 |
| Applied Materials Israel, Ltd. | 638 |
10 |
| Arcam AB | 202 |
10 |
| Carl Zeiss Microscopy GmbH | 1246 |
8 |
| Fibics Incorporated | 23 |
8 |
| Global Plasma Solutions, Inc. | 75 |
8 |
| Intel Corporation | 46597 |
7 |
| JEOL Ltd. | 613 |
7 |
| Other owners | 308 |