- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/30 - Electron-beam or ion-beam tubes for localised treatment of objects
Patent holdings for IPC class H01J 37/30
Total number of patents in this class: 764
10-year publication summary
|
77
|
57
|
55
|
59
|
50
|
35
|
35
|
45
|
34
|
35
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| NuFlare Technology, Inc. | 928 |
60 |
| Hitachi High-Tech Corporation | 5969 |
55 |
| FEI Company | 1062 |
49 |
| ASML Netherlands B.V. | 8019 |
45 |
| Applied Materials, Inc. | 20579 |
37 |
| Varian Semiconductor Equipment Associates, Inc. | 1177 |
34 |
| Hitachi High-Technologies Corporation | 1986 |
24 |
| Hitachi High-Tech Analysis Corporation | 286 |
21 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 48861 |
17 |
| Axcelis Technologies, Inc. | 425 |
16 |
| Carl Zeiss SMT GmbH | 3370 |
13 |
| Multibeam Corporation | 30 |
12 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 110 |
11 |
| Applied Materials Israel, Ltd. | 688 |
10 |
| Arcam AB | 200 |
10 |
| Carl Zeiss Microscopy GmbH | 1296 |
8 |
| Fibics Incorporated | 22 |
8 |
| Global Plasma Solutions, Inc. | 75 |
8 |
| Intel Corporation | 46292 |
7 |
| JEOL Ltd. | 626 |
7 |
| Other owners | 312 |