- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/30 - Electron-beam or ion-beam tubes for localised treatment of objects
Patent holdings for IPC class H01J 37/30
Total number of patents in this class: 722
10-year publication summary
|
73
|
77
|
57
|
55
|
59
|
50
|
35
|
34
|
45
|
1
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| NuFlare Technology, Inc. | 809 |
58 |
| ASML Netherlands B.V. | 7179 |
46 |
| Hitachi High-Tech Corporation | 5065 |
46 |
| FEI Company | 896 |
44 |
| Varian Semiconductor Equipment Associates, Inc. | 1250 |
39 |
| Applied Materials, Inc. | 17779 |
29 |
| Hitachi High-Technologies Corporation | 2018 |
24 |
| Hitachi High-Tech Science Corporation | 323 |
21 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 40644 |
16 |
| Applied Materials Israel, Ltd. | 578 |
10 |
| Arcam AB | 202 |
10 |
| Axcelis Technologies, Inc. | 395 |
10 |
| Multibeam Corporation | 25 |
10 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 108 |
10 |
| Carl Zeiss Microscopy GmbH | 1175 |
9 |
| Carl Zeiss SMT GmbH | 2819 |
8 |
| Global Plasma Solutions, Inc. | 75 |
8 |
| Intel Corporation | 46153 |
7 |
| Fibics Incorporated | 25 |
7 |
| JEOL Ltd. | 562 |
7 |
| Other owners | 303 |