Patent holdings for IPC class H01J 37/302

Total number of patents in this class: 380

10-year publication summary

39
41
32
26
18
14
25
12
18
2
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
NuFlare Technology, Inc.
902
105
D2s, Inc.
188
23
Varian Semiconductor Equipment Associates, Inc.
1208
18
FEI Company
1025
17
Applied Materials, Inc.
19849
16
Taiwan Semiconductor Manufacturing Company, Ltd.
46813
14
IMS Nanofabrication GmbH
60
14
ASML Netherlands B.V.
7689
13
Axcelis Technologies, Inc.
431
13
Carl Zeiss Microscopy GmbH
1246
10
Hitachi High-Tech Corporation
5596
9
Carl Zeiss SMT GmbH
3176
6
Hitachi High-Tech Analysis Corporation
286
6
Intel Corporation
46597
5
Applied Materials Israel, Ltd.
638
5
JEOL Ltd.
613
5
Sumitomo Heavy Industries ION Technology Co., Ltd.
122
5
Purdue Research Foundation
3805
4
Aselta Nanographics
11
4
Nippon Control System Corporation
19
4
Other owners 84