- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/311 - Etching the insulating layers
Patent holdings for IPC class H01L 21/311
Total number of patents in this class: 12516
10-year publication summary
|
1363
|
1270
|
1281
|
1425
|
1466
|
1057
|
903
|
814
|
785
|
532
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Taiwan Semiconductor Manufacturing Company, Ltd. | 43158 |
2352 |
| Tokyo Electron Limited | 12841 |
1134 |
| Applied Materials, Inc. | 18819 |
739 |
| Samsung Electronics Co., Ltd. | 147334 |
615 |
| International Business Machines Corporation | 61402 |
505 |
| Lam Research Corporation | 5302 |
468 |
| Micron Technology, Inc. | 26164 |
326 |
| Kioxia Corporation | 10346 |
296 |
| GLOBALFOUNDRIES U.S. Inc. | 6427 |
288 |
| United Microelectronics Corp. | 4247 |
281 |
| Semiconductor Manufacturing International (Shanghai) Corporation | 1765 |
207 |
| Intel Corporation | 47093 |
200 |
| Nanya Technology Corporation | 2522 |
161 |
| ASM IP Holding B.V. | 2100 |
160 |
| SK Hynix Inc. | 11438 |
152 |
| Semiconductor Manufacturing International (Beijing) Corporation | 1033 |
139 |
| Tokyo Electron U.S. Holdings, Inc | 763 |
133 |
| Texas Instruments Incorporated | 19454 |
106 |
| Changxin Memory Technologies, Inc. | 4927 |
103 |
| Sandisk Technologies Inc. | 4825 |
102 |
| Other owners | 4049 |