- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/311 - Etching the insulating layers
Patent holdings for IPC class H01L 21/311
Total number of patents in this class: 13000
10-year publication summary
|
1270
|
1281
|
1425
|
1467
|
1057
|
907
|
823
|
783
|
803
|
257
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Taiwan Semiconductor Manufacturing Company, Ltd. | 47734 |
2481 |
| Tokyo Electron Limited | 13617 |
1221 |
| Applied Materials, Inc. | 20145 |
777 |
| Samsung Electronics Co., Ltd. | 155224 |
628 |
| International Business Machines Corporation | 62325 |
510 |
| Lam Research Corporation | 5560 |
495 |
| Micron Technology, Inc. | 27384 |
319 |
| Kioxia Corporation | 10727 |
302 |
| GLOBALFOUNDRIES U.S. Inc. | 6397 |
288 |
| United Microelectronics Corp. | 4463 |
283 |
| Semiconductor Manufacturing International (Shanghai) Corporation | 1739 |
211 |
| Intel Corporation | 46737 |
198 |
| Nanya Technology Corporation | 2870 |
170 |
| ASM IP Holding B.V. | 2319 |
163 |
| Tokyo Electron U.S. Holdings, Inc | 885 |
159 |
| SK Hynix Inc. | 12267 |
155 |
| Semiconductor Manufacturing International (Beijing) Corporation | 1032 |
138 |
| Adeia Semiconductor Solutions LLC | 761 |
126 |
| Texas Instruments Incorporated | 19636 |
117 |
| Yangtze Memory Technologies Co., Ltd. | 3225 |
105 |
| Other owners | 4154 |