- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/311 - Etching the insulating layers
Patent holdings for IPC class H01L 21/311
Total number of patents in this class: 11970
10-year publication summary
|
1363
|
1270
|
1281
|
1425
|
1465
|
1053
|
884
|
777
|
776
|
24
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Taiwan Semiconductor Manufacturing Company, Ltd. | 40539 |
2248 |
| Tokyo Electron Limited | 12090 |
1046 |
| Applied Materials, Inc. | 17696 |
664 |
| Samsung Electronics Co., Ltd. | 138518 |
590 |
| International Business Machines Corporation | 60075 |
498 |
| Lam Research Corporation | 4983 |
435 |
| Micron Technology, Inc. | 25756 |
333 |
| GLOBALFOUNDRIES U.S. Inc. | 6431 |
288 |
| Kioxia Corporation | 10122 |
288 |
| United Microelectronics Corp. | 4103 |
280 |
| Semiconductor Manufacturing International (Shanghai) Corporation | 1774 |
207 |
| Intel Corporation | 46097 |
188 |
| Nanya Technology Corporation | 2225 |
147 |
| ASM IP Holding B.V. | 1877 |
144 |
| SK Hynix Inc. | 10758 |
143 |
| Semiconductor Manufacturing International (Beijing) Corporation | 1032 |
139 |
| Sandisk Technologies LLC | 5660 |
126 |
| Tokyo Electron U.S. Holdings, Inc | 661 |
119 |
| Texas Instruments Incorporated | 19405 |
104 |
| Changxin Memory Technologies, Inc. | 4919 |
101 |
| Other owners | 3882 |