- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/311 - Etching the insulating layers
Patent holdings for IPC class H01L 21/311
Total number of patents in this class: 12967
10-year publication summary
|
1270
|
1281
|
1425
|
1467
|
1057
|
903
|
804
|
746
|
800
|
281
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Taiwan Semiconductor Manufacturing Company, Ltd. | 48248 |
2477 |
| Tokyo Electron Limited | 13796 |
1210 |
| Applied Materials, Inc. | 20363 |
774 |
| Samsung Electronics Co., Ltd. | 157557 |
627 |
| International Business Machines Corporation | 62621 |
509 |
| Lam Research Corporation | 5621 |
491 |
| Micron Technology, Inc. | 27626 |
316 |
| Kioxia Corporation | 10805 |
301 |
| GLOBALFOUNDRIES U.S. Inc. | 6391 |
287 |
| United Microelectronics Corp. | 4492 |
281 |
| Semiconductor Manufacturing International (Shanghai) Corporation | 1735 |
210 |
| Intel Corporation | 47102 |
198 |
| Nanya Technology Corporation | 2900 |
170 |
| ASM IP Holding B.V. | 2387 |
159 |
| Tokyo Electron U.S. Holdings, Inc | 899 |
159 |
| SK Hynix Inc. | 12452 |
154 |
| Semiconductor Manufacturing International (Beijing) Corporation | 1031 |
137 |
| Adeia Semiconductor Solutions LLC | 760 |
126 |
| Texas Instruments Incorporated | 19663 |
117 |
| Yangtze Memory Technologies Co., Ltd. | 3301 |
104 |
| Other owners | 4160 |