- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/311 - Etching the insulating layers
Patent holdings for IPC class H01L 21/311
Total number of patents in this class: 12679
10-year publication summary
|
1363
|
1270
|
1281
|
1425
|
1467
|
1056
|
907
|
816
|
791
|
710
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Taiwan Semiconductor Manufacturing Company, Ltd. | 45023 |
2418 |
| Tokyo Electron Limited | 13063 |
1163 |
| Applied Materials, Inc. | 19119 |
751 |
| Samsung Electronics Co., Ltd. | 148649 |
618 |
| International Business Machines Corporation | 61694 |
504 |
| Lam Research Corporation | 5349 |
475 |
| Micron Technology, Inc. | 26395 |
327 |
| Kioxia Corporation | 10450 |
299 |
| GLOBALFOUNDRIES U.S. Inc. | 6415 |
288 |
| United Microelectronics Corp. | 4288 |
283 |
| Semiconductor Manufacturing International (Shanghai) Corporation | 1752 |
206 |
| Intel Corporation | 46703 |
198 |
| Nanya Technology Corporation | 2632 |
166 |
| ASM IP Holding B.V. | 2141 |
160 |
| SK Hynix Inc. | 11607 |
153 |
| Tokyo Electron U.S. Holdings, Inc | 802 |
144 |
| Semiconductor Manufacturing International (Beijing) Corporation | 1033 |
138 |
| Texas Instruments Incorporated | 19486 |
109 |
| Changxin Memory Technologies, Inc. | 4929 |
104 |
| Sandisk Technologies Inc. | 4906 |
102 |
| Other owners | 4073 |