- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/311 - Etching the insulating layers
Patent holdings for IPC class H01L 21/311
Total number of patents in this class: 12889
10-year publication summary
|
1270
|
1281
|
1425
|
1467
|
1057
|
901
|
785
|
713
|
786
|
296
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Taiwan Semiconductor Manufacturing Company, Ltd. | 48861 |
2463 |
| Tokyo Electron Limited | 13948 |
1202 |
| Applied Materials, Inc. | 20579 |
765 |
| Samsung Electronics Co., Ltd. | 159029 |
622 |
| International Business Machines Corporation | 62805 |
507 |
| Lam Research Corporation | 5705 |
488 |
| Micron Technology, Inc. | 27793 |
306 |
| Kioxia Corporation | 11017 |
303 |
| GLOBALFOUNDRIES U.S. Inc. | 6390 |
287 |
| United Microelectronics Corp. | 4522 |
278 |
| Semiconductor Manufacturing International (Shanghai) Corporation | 1731 |
210 |
| Intel Corporation | 46292 |
195 |
| Nanya Technology Corporation | 2961 |
170 |
| Tokyo Electron U.S. Holdings, Inc | 918 |
159 |
| ASM IP Holding B.V. | 2432 |
157 |
| SK Hynix Inc. | 12667 |
152 |
| Semiconductor Manufacturing International (Beijing) Corporation | 1031 |
137 |
| Adeia Semiconductor Solutions LLC | 760 |
126 |
| Texas Instruments Incorporated | 19644 |
118 |
| Sandisk Technologies Inc. | 5485 |
103 |
| Other owners | 4141 |