- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/311 - Etching the insulating layers
Patent holdings for IPC class H01L 21/311
Total number of patents in this class: 12894
10-year publication summary
|
1270
|
1281
|
1425
|
1467
|
1056
|
906
|
826
|
794
|
812
|
100
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Taiwan Semiconductor Manufacturing Company, Ltd. | 46560 |
2459 |
| Tokyo Electron Limited | 13363 |
1203 |
| Applied Materials, Inc. | 19628 |
774 |
| Samsung Electronics Co., Ltd. | 151303 |
630 |
| International Business Machines Corporation | 61906 |
506 |
| Lam Research Corporation | 5433 |
489 |
| Micron Technology, Inc. | 27172 |
329 |
| Kioxia Corporation | 10521 |
300 |
| GLOBALFOUNDRIES U.S. Inc. | 6405 |
288 |
| United Microelectronics Corp. | 4385 |
283 |
| Semiconductor Manufacturing International (Shanghai) Corporation | 1745 |
207 |
| Intel Corporation | 46579 |
196 |
| Nanya Technology Corporation | 2739 |
168 |
| ASM IP Holding B.V. | 2225 |
161 |
| SK Hynix Inc. | 11894 |
154 |
| Tokyo Electron U.S. Holdings, Inc | 835 |
154 |
| Semiconductor Manufacturing International (Beijing) Corporation | 1034 |
138 |
| Adeia Semiconductor Solutions LLC | 757 |
125 |
| Texas Instruments Incorporated | 19553 |
116 |
| Yangtze Memory Technologies Co., Ltd. | 3050 |
105 |
| Other owners | 4109 |