- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/3213 - Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
Patent holdings for IPC class H01L 21/3213
Total number of patents in this class: 5736
10-year publication summary
|
508
|
586
|
699
|
666
|
469
|
431
|
374
|
351
|
331
|
6
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Taiwan Semiconductor Manufacturing Company, Ltd. | 46308 |
1074 |
| Tokyo Electron Limited | 13207 |
454 |
| Applied Materials, Inc. | 19391 |
351 |
| Samsung Electronics Co., Ltd. | 149838 |
291 |
| Lam Research Corporation | 5394 |
225 |
| International Business Machines Corporation | 61840 |
218 |
| Micron Technology, Inc. | 26703 |
123 |
| GLOBALFOUNDRIES U.S. Inc. | 6417 |
95 |
| United Microelectronics Corp. | 4330 |
88 |
| Kioxia Corporation | 10479 |
85 |
| Tokyo Electron U.S. Holdings, Inc | 814 |
83 |
| Semiconductor Manufacturing International (Shanghai) Corporation | 1748 |
76 |
| Texas Instruments Incorporated | 19521 |
70 |
| Boe Technology Group Co., Ltd. | 42050 |
70 |
| SK Hynix Inc. | 11732 |
65 |
| Nanya Technology Corporation | 2691 |
61 |
| Samsung Display Co., Ltd. | 36705 |
57 |
| ASM IP Holding B.V. | 2196 |
52 |
| Changxin Memory Technologies, Inc. | 4927 |
47 |
| Hitachi High-Tech Corporation | 5508 |
47 |
| Other owners | 2104 |