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  • All sections
  • C - Chemistrymetallurgy
  • C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
  • C23C 16/24 - Deposition of silicon only

Patent holdings for IPC class C23C 16/24

Total number of patents in this class: 1009

10-year publication summary

77
86
76
77
59
64
89
68
91
50
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
Applied Materials, Inc.
20375
104
Tokyo Electron Limited
13807
74
Sumco Corporation
1111
43
Kokusai Electric Corporation
2226
42
ASM IP Holding B.V.
2397
38
Wacker Chemie AG
2112
31
Shin-Etsu Chemical Co., Ltd.
6096
23
Shin-Etsu Handotai Co., Ltd.
1307
18
Lam Research Corporation
5635
17
L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
4117
16
Nexeon Limited
182
16
Silcotek Corp.
73
15
Group14 Technologies, Inc.
120
12
Versum Materials US, LLC
678
12
Agilent Technologies, Inc.
2634
11
Tokuyama Corporation
1477
9
QROMIS, Inc.
97
9
Samsung Electronics Co., Ltd.
157719
8
Taiwan Semiconductor Manufacturing Company, Ltd.
48302
8
American Air Liquide, Inc.
267
8
Other owners 495

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