- All sections
- C - Chemistrymetallurgy
- C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/24 - Deposition of silicon only
Patent holdings for IPC class C23C 16/24
Total number of patents in this class: 945
10-year publication summary
|
57
|
74
|
86
|
76
|
77
|
59
|
63
|
85
|
67
|
72
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 19072 |
96 |
| Tokyo Electron Limited | 13031 |
71 |
| Sumco Corporation | 1116 |
41 |
| Kokusai Electric Corporation | 2082 |
41 |
| ASM IP Holding B.V. | 2133 |
32 |
| Wacker Chemie AG | 2111 |
28 |
| Shin-Etsu Chemical Co., Ltd. | 5732 |
23 |
| Shin-Etsu Handotai Co., Ltd. | 1294 |
17 |
| L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude | 3992 |
16 |
| Silcotek Corp. | 68 |
13 |
| Group14 Technologies, Inc. | 113 |
12 |
| Nexeon Limited | 160 |
12 |
| Versum Materials US, LLC | 653 |
12 |
| Lam Research Corporation | 5335 |
11 |
| Agilent Technologies, Inc. | 2628 |
11 |
| Tokuyama Corporation | 1422 |
9 |
| QROMIS, Inc. | 97 |
9 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 44433 |
8 |
| American Air Liquide, Inc. | 252 |
8 |
| High-purity Silicon Corporation | 73 |
8 |
| Other owners | 467 |