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  • All sections
  • C - Chemistrymetallurgy
  • C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
  • C23C 16/24 - Deposition of silicon only

Patent holdings for IPC class C23C 16/24

Total number of patents in this class: 921

10-year publication summary

58
77
86
76
77
59
64
86
67
48
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Applied Materials, Inc.
18475
92
Tokyo Electron Limited
12599
71
Sumco Corporation
1122
41
Kokusai Electric Corporation
1973
41
ASM IP Holding B.V.
2048
32
Wacker Chemie AG
2104
28
Shin-Etsu Chemical Co., Ltd.
5615
23
L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
3949
16
Shin-Etsu Handotai Co., Ltd.
1287
15
Silcotek Corp.
67
12
Versum Materials US, LLC
639
12
Agilent Technologies, Inc.
2634
11
Group14 Technologies, Inc.
105
11
Lam Research Corporation
5217
10
Nexeon Limited
156
10
Tokuyama Corporation
1380
9
QROMIS, Inc.
95
9
Taiwan Semiconductor Manufacturing Company, Ltd.
42288
8
American Air Liquide, Inc.
249
8
High-purity Silicon Corporation
73
8
Other owners 454

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