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  • All sections
  • C - Chemistrymetallurgy
  • C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
  • C23C 16/24 - Deposition of silicon only

Patent holdings for IPC class C23C 16/24

Total number of patents in this class: 998

10-year publication summary

77
86
76
77
59
64
88
68
91
37
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
Applied Materials, Inc.
20191
103
Tokyo Electron Limited
13642
73
Sumco Corporation
1109
43
Kokusai Electric Corporation
2200
41
ASM IP Holding B.V.
2325
36
Wacker Chemie AG
2106
31
Shin-Etsu Chemical Co., Ltd.
6004
23
Shin-Etsu Handotai Co., Ltd.
1304
18
Lam Research Corporation
5563
17
L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
4078
16
Nexeon Limited
176
15
Silcotek Corp.
73
15
Group14 Technologies, Inc.
118
12
Versum Materials US, LLC
671
12
Agilent Technologies, Inc.
2647
11
Tokuyama Corporation
1461
9
QROMIS, Inc.
97
9
Samsung Electronics Co., Ltd.
155524
8
Taiwan Semiconductor Manufacturing Company, Ltd.
47782
8
American Air Liquide, Inc.
265
8
Other owners 490

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