- All sections
- C - Chemistrymetallurgy
- C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/505 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
Patent holdings for IPC class C23C 16/505
Total number of patents in this class: 1270
10-year publication summary
|
81
|
108
|
103
|
112
|
102
|
150
|
109
|
99
|
131
|
71
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 20579 |
335 |
| Lam Research Corporation | 5705 |
232 |
| Tokyo Electron Limited | 13948 |
125 |
| ASM IP Holding B.V. | 2432 |
48 |
| Nissin Electric Co., Ltd. | 275 |
26 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 48861 |
21 |
| Novellus Systems, Inc. | 447 |
21 |
| Kokusai Electric Corporation | 2249 |
18 |
| Jusung Engineering Co., Ltd. | 503 |
16 |
| Samsung Electronics Co., Ltd. | 159029 |
14 |
| Sio2 Medical Products, LLC | 109 |
13 |
| Jiangsu Favored Nanotechnology Co., LTD | 170 |
11 |
| Versum Materials US, LLC | 682 |
10 |
| Quantum Elements Development, Inc. | 18 |
10 |
| Beijing Naura Microelectronics Equipment Co., Ltd. | 757 |
9 |
| ULVAC, Inc. | 1337 |
8 |
| Hanwha Precision Machinery Co., Ltd. | 138 |
8 |
| EMD Corporation | 27 |
6 |
| Sio2 Medical Products, Inc. | 104 |
6 |
| Samsung Display Co., Ltd. | 39087 |
5 |
| Other owners | 328 |