- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/304 - Controlling tubes by information coming from the objects, e.g. correction signals
Patent holdings for IPC class H01J 37/304
Total number of patents in this class: 574
10-year publication summary
|
62
|
25
|
36
|
49
|
41
|
38
|
41
|
52
|
43
|
27
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| NuFlare Technology, Inc. | 836 |
109 |
| Applied Materials, Inc. | 18406 |
47 |
| Axcelis Technologies, Inc. | 400 |
31 |
| Hitachi High-Tech Corporation | 5241 |
31 |
| FEI Company | 937 |
27 |
| ASML Netherlands B.V. | 7312 |
22 |
| Carl Zeiss Microscopy GmbH | 1200 |
21 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 111 |
20 |
| Hitachi High-Tech Science Corporation | 324 |
17 |
| Varian Semiconductor Equipment Associates, Inc. | 1233 |
17 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 42118 |
16 |
| Carl Zeiss SMT GmbH | 2940 |
15 |
| Arcam AB | 203 |
12 |
| Nikon Corporation | 7159 |
10 |
| Mapper Lithography IP B.V. | 135 |
10 |
| Fibics Incorporated | 26 |
8 |
| JEOL Ltd. | 572 |
7 |
| Applied Materials Israel, Ltd. | 601 |
6 |
| Advantest Corporation | 1831 |
5 |
| KLA Corporation | 1512 |
5 |
| Other owners | 138 |