Patent holdings for IPC class H01J 37/304

Total number of patents in this class: 574

10-year publication summary

62
25
36
49
41
38
41
52
43
26
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
NuFlare Technology, Inc.
836
109
Applied Materials, Inc.
18383
46
Axcelis Technologies, Inc.
401
31
Hitachi High-Tech Corporation
5233
31
FEI Company
934
27
ASML Netherlands B.V.
7301
22
Carl Zeiss Microscopy GmbH
1202
21
Sumitomo Heavy Industries ION Technology Co., Ltd.
111
20
Varian Semiconductor Equipment Associates, Inc.
1235
18
Hitachi High-Tech Science Corporation
324
17
Taiwan Semiconductor Manufacturing Company, Ltd.
42036
16
Carl Zeiss SMT GmbH
2935
15
Arcam AB
203
12
Nikon Corporation
7155
10
Mapper Lithography IP B.V.
135
10
Fibics Incorporated
26
8
JEOL Ltd.
571
7
Applied Materials Israel, Ltd.
599
6
Advantest Corporation
1831
5
KLA Corporation
1503
5
Other owners 138