- All sections
- C - Chemistrymetallurgy
- C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/48 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
Patent holdings for IPC class C23C 16/48
Total number of patents in this class: 554
10-year publication summary
|
72
|
59
|
50
|
54
|
52
|
35
|
51
|
24
|
43
|
23
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 18706 |
79 |
| Tokyo Electron Limited | 12751 |
24 |
| ASM IP Holding B.V. | 2080 |
17 |
| Quantum Elements Development, Inc. | 19 |
14 |
| Free Form Fibers, LLC | 39 |
12 |
| Versum Materials US, LLC | 642 |
11 |
| Kokusai Electric Corporation | 2023 |
11 |
| Samsung Electronics Co., Ltd. | 146534 |
10 |
| ASML Netherlands B.V. | 7394 |
10 |
| FEI Company | 947 |
9 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 42863 |
8 |
| Utica Leaseco, LLC Assignee | 103 |
8 |
| Varian Semiconductor Equipment Associates, Inc. | 1231 |
7 |
| Lam Research Corporation | 5259 |
7 |
| Dynetics, Inc. | 13 |
6 |
| International Business Machines Corporation | 61287 |
5 |
| Carl Zeiss SMT GmbH | 2988 |
5 |
| The Aerospace Corporation | 424 |
5 |
| Aixtron SE | 319 |
5 |
| National University of Singapore | 2453 |
5 |
| Other owners | 296 |