- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/317 - Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation
Patent holdings for IPC class H01J 37/317
Total number of patents in this class: 2851
10-year publication summary
|
209
|
184
|
204
|
218
|
161
|
161
|
182
|
184
|
203
|
25
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| NuFlare Technology, Inc. | 898 |
332 |
| Varian Semiconductor Equipment Associates, Inc. | 1211 |
303 |
| Applied Materials, Inc. | 19717 |
275 |
| Axcelis Technologies, Inc. | 430 |
253 |
| ASML Netherlands B.V. | 7673 |
175 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 46661 |
112 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 122 |
98 |
| Mapper Lithography IP B.V. | 132 |
77 |
| Entegris, Inc. | 1957 |
53 |
| Hitachi High-Technologies Corporation | 1993 |
37 |
| Nissin ION Equipment Co., Ltd. | 95 |
34 |
| D2s, Inc. | 187 |
33 |
| Hitachi High-Tech Corporation | 5578 |
30 |
| IMS Nanofabrication GmbH | 60 |
29 |
| FEI Company | 1021 |
28 |
| mi2-factory GmbH | 35 |
27 |
| Advanced ION Beam Technology, Inc. | 69 |
25 |
| Praxair Technology, Inc. | 1259 |
21 |
| Carl Zeiss MultiSEM GmbH | 160 |
20 |
| Advantest Corporation | 1740 |
19 |
| Other owners | 870 |