- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/317 - Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation
Patent holdings for IPC class H01J 37/317
Total number of patents in this class: 2766
10-year publication summary
|
226
|
209
|
185
|
205
|
219
|
164
|
162
|
179
|
182
|
92
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| NuFlare Technology, Inc. | 836 |
314 |
| Varian Semiconductor Equipment Associates, Inc. | 1235 |
313 |
| Axcelis Technologies, Inc. | 401 |
240 |
| Applied Materials, Inc. | 18383 |
235 |
| ASML Netherlands B.V. | 7301 |
172 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 42036 |
108 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 111 |
89 |
| Mapper Lithography IP B.V. | 135 |
80 |
| Entegris, Inc. | 1854 |
50 |
| Hitachi High-Technologies Corporation | 2006 |
37 |
| D2s, Inc. | 170 |
33 |
| Nissin ION Equipment Co., Ltd. | 82 |
29 |
| Hitachi High-Tech Corporation | 5233 |
28 |
| Advanced ION Beam Technology, Inc. | 70 |
27 |
| FEI Company | 934 |
27 |
| Hitachi High-Tech Science Corporation | 324 |
26 |
| IMS Nanofabrication GmbH | 59 |
26 |
| mi2-factory GmbH | 33 |
26 |
| Praxair Technology, Inc. | 1313 |
21 |
| Advantest Corporation | 1831 |
19 |
| Other owners | 866 |