- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/3065 - Plasma etchingReactive-ion etching
Patent holdings for IPC class H01L 21/3065
Total number of patents in this class: 8959
10-year publication summary
|
741
|
750
|
760
|
796
|
588
|
561
|
544
|
593
|
640
|
206
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Tokyo Electron Limited | 13465 |
1768 |
| Applied Materials, Inc. | 19938 |
911 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 47071 |
772 |
| Lam Research Corporation | 5500 |
569 |
| Hitachi High-Tech Corporation | 5629 |
253 |
| International Business Machines Corporation | 62148 |
193 |
| Samsung Electronics Co., Ltd. | 153093 |
142 |
| Tokyo Electron U.S. Holdings, Inc | 863 |
94 |
| ULVAC, Inc. | 1369 |
84 |
| Semiconductor Components Industries, L.L.C. | 5265 |
75 |
| Adeia Semiconductor Solutions LLC | 758 |
75 |
| ASM IP Holding B.V. | 2272 |
68 |
| Panasonic Intellectual Property Management Co., Ltd. | 33401 |
67 |
| GLOBALFOUNDRIES U.S. Inc. | 6398 |
63 |
| Semiconductor Manufacturing International (Shanghai) Corporation | 1739 |
63 |
| Disco Corporation | 1925 |
60 |
| Kioxia Corporation | 10704 |
60 |
| Central Glass Company, Limited | 1286 |
57 |
| Sumitomo Electric Industries, Ltd. | 16061 |
56 |
| Kyocera Corporation | 14233 |
54 |
| Other owners | 3475 |