- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/3065 - Plasma etchingReactive-ion etching
Patent holdings for IPC class H01L 21/3065
Total number of patents in this class: 8581
10-year publication summary
|
616
|
741
|
750
|
760
|
796
|
589
|
557
|
531
|
583
|
440
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Tokyo Electron Limited | 12841 |
1656 |
| Applied Materials, Inc. | 18819 |
872 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 43158 |
712 |
| Lam Research Corporation | 5302 |
562 |
| Hitachi High-Tech Corporation | 5357 |
228 |
| International Business Machines Corporation | 61402 |
192 |
| Samsung Electronics Co., Ltd. | 147334 |
135 |
| Tokyo Electron U.S. Holdings, Inc | 763 |
87 |
| ULVAC, Inc. | 1379 |
85 |
| Semiconductor Components Industries, L.L.C. | 5266 |
73 |
| Panasonic Intellectual Property Management Co., Ltd. | 31756 |
66 |
| ASM IP Holding B.V. | 2100 |
64 |
| GLOBALFOUNDRIES U.S. Inc. | 6427 |
63 |
| Semiconductor Manufacturing International (Shanghai) Corporation | 1765 |
63 |
| Disco Corporation | 1868 |
59 |
| Kioxia Corporation | 10346 |
58 |
| Sumitomo Electric Industries, Ltd. | 15576 |
56 |
| Adeia Semiconductor Solutions LLC | 291 |
53 |
| Kyocera Corporation | 13887 |
52 |
| Central Glass Company, Limited | 1271 |
52 |
| Other owners | 3393 |