- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/3065 - Plasma etchingReactive-ion etching
Patent holdings for IPC class H01L 21/3065
Total number of patents in this class: 8922
10-year publication summary
|
742
|
750
|
760
|
796
|
589
|
554
|
521
|
562
|
632
|
292
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Tokyo Electron Limited | 13871 |
1766 |
| Applied Materials, Inc. | 20467 |
916 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 48560 |
760 |
| Lam Research Corporation | 5655 |
566 |
| Hitachi High-Tech Corporation | 5918 |
257 |
| International Business Machines Corporation | 62748 |
192 |
| Samsung Electronics Co., Ltd. | 158442 |
137 |
| Tokyo Electron U.S. Holdings, Inc | 910 |
94 |
| ULVAC, Inc. | 1344 |
82 |
| Semiconductor Components Industries, L.L.C. | 5253 |
75 |
| Adeia Semiconductor Solutions LLC | 761 |
75 |
| Panasonic Intellectual Property Management Co., Ltd. | 34265 |
67 |
| ASM IP Holding B.V. | 2412 |
67 |
| GLOBALFOUNDRIES U.S. Inc. | 6380 |
63 |
| Semiconductor Manufacturing International (Shanghai) Corporation | 1732 |
63 |
| Kioxia Corporation | 10856 |
61 |
| Central Glass Company, Limited | 1297 |
58 |
| Disco Corporation | 1957 |
58 |
| Sumitomo Electric Industries, Ltd. | 16448 |
56 |
| Kyocera Corporation | 14423 |
54 |
| Other owners | 3455 |