- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/3065 - Plasma etchingReactive-ion etching
Patent holdings for IPC class H01L 21/3065
Total number of patents in this class: 8466
10-year publication summary
|
616
|
742
|
750
|
760
|
796
|
590
|
557
|
530
|
579
|
324
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Tokyo Electron Limited | 12645 |
1600 |
| Applied Materials, Inc. | 18530 |
863 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 42461 |
704 |
| Lam Research Corporation | 5217 |
561 |
| Hitachi High-Tech Corporation | 5282 |
225 |
| International Business Machines Corporation | 61207 |
190 |
| Samsung Electronics Co., Ltd. | 145416 |
135 |
| ULVAC, Inc. | 1380 |
85 |
| Tokyo Electron U.S. Holdings, Inc | 729 |
83 |
| Semiconductor Components Industries, L.L.C. | 5253 |
73 |
| Panasonic Intellectual Property Management Co., Ltd. | 31221 |
66 |
| ASM IP Holding B.V. | 2061 |
64 |
| GLOBALFOUNDRIES U.S. Inc. | 6430 |
63 |
| Semiconductor Manufacturing International (Shanghai) Corporation | 1771 |
63 |
| Disco Corporation | 1852 |
58 |
| Kioxia Corporation | 10285 |
58 |
| Sumitomo Electric Industries, Ltd. | 15428 |
56 |
| Adeia Semiconductor Solutions LLC | 290 |
53 |
| Kyocera Corporation | 13784 |
51 |
| Central Glass Company, Limited | 1262 |
50 |
| Other owners | 3365 |